7/15/2012	1:13:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	1:13:35 PM	Recipe started at 1:13 PM
7/15/2012	1:13:35 PM	Helium valve closed
7/15/2012	1:13:35 PM	H2 valve closed
7/15/2012	1:13:35 PM	BCl3 valve closed
7/15/2012	1:13:35 PM	PH3 valve closed
7/15/2012	1:13:35 PM	SiCl4 pre valve closed
7/15/2012	1:13:35 PM	SiCl4 post valve closed
7/15/2012	1:13:35 PM	Main Vac valve closed
7/15/2012	1:13:35 PM	Bypass valve closed
7/15/2012	1:13:35 PM	Bubbler valve closed
7/15/2012	1:13:35 PM	Helium MFC set to  0.000000
7/15/2012	1:13:35 PM	H2 MFC set to  0.000000
7/15/2012	1:13:35 PM	BCl3 MFC set to  0.000000
7/15/2012	1:13:35 PM	PH3 MFC set to  0.000000
7/15/2012	1:13:35 PM	SiCl4 MFC set to  0.000000
7/15/2012	1:13:35 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	1:13:35 PM	Tube furnace set to 0
7/15/2012	1:13:38 PM	H2 valve closed
7/15/2012	1:13:38 PM	BCl3 valve closed
7/15/2012	1:13:38 PM	PH3 valve closed
7/15/2012	1:13:38 PM	SiCl4 pre valve closed
7/15/2012	1:13:38 PM	SiCl4 post valve closed
7/15/2012	1:13:38 PM	Main Vac valve closed
7/15/2012	1:13:38 PM	Bypass valve closed
7/15/2012	1:13:38 PM	Bubbler valve closed
7/15/2012	1:13:38 PM	Helium valve opened
7/15/2012	1:13:38 PM	Helium MFC set to  500.000000
7/15/2012	1:13:38 PM	H2 MFC set to  0.000000
7/15/2012	1:13:38 PM	BCl3 MFC set to  0.000000
7/15/2012	1:13:38 PM	PH3 MFC set to  0.000000
7/15/2012	1:13:38 PM	SiCl4 MFC set to  0.000000
7/15/2012	1:13:38 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	1:13:38 PM	Tube furnace set to 0
7/15/2012	1:14:51 PM	Helium valve closed
7/15/2012	1:14:51 PM	H2 valve closed
7/15/2012	1:14:51 PM	BCl3 valve closed
7/15/2012	1:14:51 PM	PH3 valve closed
7/15/2012	1:14:51 PM	SiCl4 pre valve closed
7/15/2012	1:14:51 PM	SiCl4 post valve closed
7/15/2012	1:14:51 PM	Main Vac valve closed
7/15/2012	1:14:51 PM	Bypass valve closed
7/15/2012	1:14:51 PM	Bubbler valve closed
7/15/2012	1:14:51 PM	Helium MFC set to  0.000000
7/15/2012	1:14:51 PM	H2 MFC set to  0.000000
7/15/2012	1:14:51 PM	BCl3 MFC set to  0.000000
7/15/2012	1:14:51 PM	PH3 MFC set to  0.000000
7/15/2012	1:14:51 PM	SiCl4 MFC set to  0.000000
7/15/2012	1:14:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	1:14:51 PM	Tube furnace set to 0
7/15/2012	1:14:52 PM	Run finished at 1:14 PM
7/15/2012	1:14:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	1:24:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	1:24:18 PM	Recipe started at 1:24 PM
7/15/2012	1:24:18 PM	Helium valve closed
7/15/2012	1:24:18 PM	H2 valve closed
7/15/2012	1:24:18 PM	BCl3 valve closed
7/15/2012	1:24:18 PM	PH3 valve closed
7/15/2012	1:24:18 PM	SiCl4 pre valve closed
7/15/2012	1:24:18 PM	SiCl4 post valve closed
7/15/2012	1:24:18 PM	Main Vac valve closed
7/15/2012	1:24:18 PM	Bubbler valve closed
7/15/2012	1:24:18 PM	Bypass valve opened
7/15/2012	1:24:18 PM	Helium MFC set to  0.000000
7/15/2012	1:24:18 PM	H2 MFC set to  0.000000
7/15/2012	1:24:18 PM	BCl3 MFC set to  0.000000
7/15/2012	1:24:18 PM	PH3 MFC set to  0.000000
7/15/2012	1:24:18 PM	SiCl4 MFC set to  0.000000
7/15/2012	1:24:18 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	1:24:18 PM	Tube furnace set to 0
7/15/2012	1:25:32 PM	Helium valve closed
7/15/2012	1:25:32 PM	H2 valve closed
7/15/2012	1:25:32 PM	BCl3 valve closed
7/15/2012	1:25:32 PM	PH3 valve closed
7/15/2012	1:25:32 PM	SiCl4 pre valve closed
7/15/2012	1:25:32 PM	SiCl4 post valve closed
7/15/2012	1:25:32 PM	Main Vac valve closed
7/15/2012	1:25:32 PM	Bubbler valve closed
7/15/2012	1:25:32 PM	Bypass valve opened
7/15/2012	1:25:32 PM	Helium MFC set to  0.000000
7/15/2012	1:25:32 PM	H2 MFC set to  0.000000
7/15/2012	1:25:32 PM	BCl3 MFC set to  0.000000
7/15/2012	1:25:32 PM	PH3 MFC set to  0.000000
7/15/2012	1:25:32 PM	SiCl4 MFC set to  0.000000
7/15/2012	1:25:32 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	1:25:33 PM	Tube furnace set to 0
7/15/2012	1:26:33 PM	Helium valve closed
7/15/2012	1:26:33 PM	H2 valve closed
7/15/2012	1:26:33 PM	BCl3 valve closed
7/15/2012	1:26:33 PM	PH3 valve closed
7/15/2012	1:26:33 PM	SiCl4 pre valve closed
7/15/2012	1:26:33 PM	SiCl4 post valve closed
7/15/2012	1:26:33 PM	Bypass valve closed
7/15/2012	1:26:33 PM	Bubbler valve closed
7/15/2012	1:26:33 PM	Main Vac valve opened
7/15/2012	1:26:33 PM	Helium MFC set to  0.000000
7/15/2012	1:26:33 PM	H2 MFC set to  0.000000
7/15/2012	1:26:33 PM	BCl3 MFC set to  0.000000
7/15/2012	1:26:33 PM	PH3 MFC set to  0.000000
7/15/2012	1:26:33 PM	SiCl4 MFC set to  0.000000
7/15/2012	1:26:33 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	1:26:33 PM	Tube furnace set to 0
7/15/2012	1:26:34 PM	Run finished at 1:26 PM
7/15/2012	1:26:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	2:38:02 PM	Main Vac valve closed
7/15/2012	2:38:17 PM	Main Vac valve opened
7/15/2012	2:49:03 PM	Recipe started at 2:49 PM
7/15/2012	2:49:03 PM	Helium valve closed
7/15/2012	2:49:03 PM	H2 valve closed
7/15/2012	2:49:03 PM	BCl3 valve closed
7/15/2012	2:49:03 PM	PH3 valve closed
7/15/2012	2:49:03 PM	SiCl4 pre valve closed
7/15/2012	2:49:03 PM	SiCl4 post valve closed
7/15/2012	2:49:03 PM	Bypass valve closed
7/15/2012	2:49:03 PM	Bubbler valve closed
7/15/2012	2:49:03 PM	Main Vac valve opened
7/15/2012	2:49:03 PM	Helium MFC set to  0.000000
7/15/2012	2:49:03 PM	H2 MFC set to  0.000000
7/15/2012	2:49:03 PM	BCl3 MFC set to  0.000000
7/15/2012	2:49:03 PM	PH3 MFC set to  0.000000
7/15/2012	2:49:04 PM	SiCl4 MFC set to  0.000000
7/15/2012	2:49:04 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	2:49:04 PM	Tube furnace set to 0
7/15/2012	2:49:07 PM	Helium valve closed
7/15/2012	2:49:07 PM	H2 valve closed
7/15/2012	2:49:07 PM	BCl3 valve closed
7/15/2012	2:49:07 PM	PH3 valve closed
7/15/2012	2:49:07 PM	SiCl4 pre valve closed
7/15/2012	2:49:07 PM	SiCl4 post valve closed
7/15/2012	2:49:07 PM	Main Vac valve closed
7/15/2012	2:49:07 PM	Bypass valve closed
7/15/2012	2:49:07 PM	Bubbler valve closed
7/15/2012	2:49:07 PM	Helium MFC set to  0.000000
7/15/2012	2:49:07 PM	H2 MFC set to  0.000000
7/15/2012	2:49:07 PM	BCl3 MFC set to  0.000000
7/15/2012	2:49:07 PM	PH3 MFC set to  0.000000
7/15/2012	2:49:07 PM	SiCl4 MFC set to  0.000000
7/15/2012	2:49:07 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	2:49:07 PM	Tube furnace set to 0
7/15/2012	2:49:10 PM	Helium valve closed
7/15/2012	2:49:10 PM	BCl3 valve closed
7/15/2012	2:49:10 PM	PH3 valve closed
7/15/2012	2:49:10 PM	SiCl4 pre valve closed
7/15/2012	2:49:10 PM	SiCl4 post valve closed
7/15/2012	2:49:10 PM	Main Vac valve closed
7/15/2012	2:49:10 PM	Bypass valve closed
7/15/2012	2:49:10 PM	Bubbler valve closed
7/15/2012	2:49:10 PM	H2 valve opened
7/15/2012	2:49:10 PM	Helium MFC set to  0.000000
7/15/2012	2:49:10 PM	H2 MFC set to  500.000000
7/15/2012	2:49:10 PM	BCl3 MFC set to  0.000000
7/15/2012	2:49:10 PM	PH3 MFC set to  0.000000
7/15/2012	2:49:10 PM	SiCl4 MFC set to  0.000000
7/15/2012	2:49:10 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	2:49:10 PM	Tube furnace set to 0
7/15/2012	2:50:26 PM	Helium valve closed
7/15/2012	2:50:26 PM	BCl3 valve closed
7/15/2012	2:50:26 PM	PH3 valve closed
7/15/2012	2:50:26 PM	SiCl4 pre valve closed
7/15/2012	2:50:26 PM	SiCl4 post valve closed
7/15/2012	2:50:26 PM	Main Vac valve closed
7/15/2012	2:50:26 PM	Bypass valve closed
7/15/2012	2:50:26 PM	H2 valve opened
7/15/2012	2:50:26 PM	Bubbler valve opened
7/15/2012	2:50:26 PM	Helium MFC set to  0.000000
7/15/2012	2:50:26 PM	H2 MFC set to  500.000000
7/15/2012	2:50:26 PM	BCl3 MFC set to  0.000000
7/15/2012	2:50:26 PM	PH3 MFC set to  0.000000
7/15/2012	2:50:26 PM	SiCl4 MFC set to  0.000000
7/15/2012	2:50:26 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	2:50:26 PM	Tube furnace set to 0
7/15/2012	2:50:27 PM	Helium valve closed
7/15/2012	2:50:27 PM	BCl3 valve closed
7/15/2012	2:50:27 PM	PH3 valve closed
7/15/2012	2:50:27 PM	SiCl4 pre valve closed
7/15/2012	2:50:27 PM	SiCl4 post valve closed
7/15/2012	2:50:27 PM	Main Vac valve closed
7/15/2012	2:50:27 PM	Bypass valve closed
7/15/2012	2:50:27 PM	H2 valve opened
7/15/2012	2:50:27 PM	Bubbler valve opened
7/15/2012	2:50:27 PM	Helium MFC set to  0.000000
7/15/2012	2:50:27 PM	H2 MFC set to  500.000000
7/15/2012	2:50:27 PM	BCl3 MFC set to  0.000000
7/15/2012	2:50:27 PM	PH3 MFC set to  0.000000
7/15/2012	2:50:27 PM	SiCl4 MFC set to  0.000000
7/15/2012	2:50:27 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	2:50:27 PM	Tube furnace set to 1000
7/15/2012	3:15:27 PM	Helium valve closed
7/15/2012	3:15:27 PM	PH3 valve closed
7/15/2012	3:15:27 PM	Main Vac valve closed
7/15/2012	3:15:27 PM	Bypass valve closed
7/15/2012	3:15:27 PM	H2 valve opened
7/15/2012	3:15:27 PM	BCl3 valve opened
7/15/2012	3:15:27 PM	SiCl4 pre valve opened
7/15/2012	3:15:27 PM	SiCl4 post valve opened
7/15/2012	3:15:27 PM	Bubbler valve opened
7/15/2012	3:15:27 PM	Helium MFC set to  0.000000
7/15/2012	3:15:27 PM	H2 MFC set to  450.000000
7/15/2012	3:15:27 PM	BCl3 MFC set to  0.750000
7/15/2012	3:15:27 PM	PH3 MFC set to  0.000000
7/15/2012	3:15:27 PM	SiCl4 MFC set to  50.000000
7/15/2012	3:15:27 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	3:15:28 PM	Tube furnace set to 1000
7/15/2012	3:49:28 PM	Helium valve closed
7/15/2012	3:49:28 PM	BCl3 valve closed
7/15/2012	3:49:28 PM	PH3 valve closed
7/15/2012	3:49:28 PM	SiCl4 pre valve closed
7/15/2012	3:49:28 PM	SiCl4 post valve closed
7/15/2012	3:49:28 PM	Main Vac valve closed
7/15/2012	3:49:28 PM	Bypass valve closed
7/15/2012	3:49:28 PM	H2 valve opened
7/15/2012	3:49:28 PM	Bubbler valve opened
7/15/2012	3:49:28 PM	Helium MFC set to  0.000000
7/15/2012	3:49:28 PM	H2 MFC set to  500.000000
7/15/2012	3:49:28 PM	BCl3 MFC set to  0.000000
7/15/2012	3:49:28 PM	PH3 MFC set to  0.000000
7/15/2012	3:49:28 PM	SiCl4 MFC set to  0.000000
7/15/2012	3:49:28 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	3:49:28 PM	Tube furnace set to 750
7/15/2012	4:04:28 PM	Helium valve closed
7/15/2012	4:04:28 PM	BCl3 valve closed
7/15/2012	4:04:28 PM	PH3 valve closed
7/15/2012	4:04:28 PM	SiCl4 pre valve closed
7/15/2012	4:04:28 PM	SiCl4 post valve closed
7/15/2012	4:04:28 PM	Main Vac valve closed
7/15/2012	4:04:28 PM	Bypass valve closed
7/15/2012	4:04:28 PM	H2 valve opened
7/15/2012	4:04:28 PM	Bubbler valve opened
7/15/2012	4:04:28 PM	Helium MFC set to  0.000000
7/15/2012	4:04:28 PM	H2 MFC set to  250.000000
7/15/2012	4:04:28 PM	BCl3 MFC set to  0.000000
7/15/2012	4:04:28 PM	PH3 MFC set to  0.000000
7/15/2012	4:04:28 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:04:28 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:04:28 PM	Tube furnace set to 0
7/15/2012	4:24:28 PM	Helium valve closed
7/15/2012	4:24:28 PM	H2 valve closed
7/15/2012	4:24:28 PM	BCl3 valve closed
7/15/2012	4:24:28 PM	PH3 valve closed
7/15/2012	4:24:28 PM	SiCl4 pre valve closed
7/15/2012	4:24:28 PM	SiCl4 post valve closed
7/15/2012	4:24:28 PM	Main Vac valve closed
7/15/2012	4:24:28 PM	Bypass valve closed
7/15/2012	4:24:28 PM	Bubbler valve closed
7/15/2012	4:24:28 PM	Helium MFC set to  0.000000
7/15/2012	4:24:28 PM	H2 MFC set to  0.000000
7/15/2012	4:24:28 PM	BCl3 MFC set to  0.000000
7/15/2012	4:24:28 PM	PH3 MFC set to  0.000000
7/15/2012	4:24:28 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:24:28 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:24:28 PM	Tube furnace set to 0
7/15/2012	4:24:31 PM	Helium valve closed
7/15/2012	4:24:31 PM	H2 valve closed
7/15/2012	4:24:31 PM	BCl3 valve closed
7/15/2012	4:24:31 PM	PH3 valve closed
7/15/2012	4:24:31 PM	SiCl4 pre valve closed
7/15/2012	4:24:31 PM	SiCl4 post valve closed
7/15/2012	4:24:31 PM	Main Vac valve closed
7/15/2012	4:24:31 PM	Bubbler valve closed
7/15/2012	4:24:31 PM	Bypass valve opened
7/15/2012	4:24:31 PM	Helium MFC set to  0.000000
7/15/2012	4:24:31 PM	H2 MFC set to  0.000000
7/15/2012	4:24:31 PM	BCl3 MFC set to  0.000000
7/15/2012	4:24:31 PM	PH3 MFC set to  0.000000
7/15/2012	4:24:31 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:24:31 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:24:31 PM	Tube furnace set to 0
7/15/2012	4:25:03 PM	Helium valve closed
7/15/2012	4:25:03 PM	H2 valve closed
7/15/2012	4:25:03 PM	BCl3 valve closed
7/15/2012	4:25:03 PM	PH3 valve closed
7/15/2012	4:25:03 PM	SiCl4 pre valve closed
7/15/2012	4:25:03 PM	SiCl4 post valve closed
7/15/2012	4:25:03 PM	Main Vac valve closed
7/15/2012	4:25:03 PM	Bubbler valve closed
7/15/2012	4:25:03 PM	Bypass valve opened
7/15/2012	4:25:03 PM	Helium MFC set to  0.000000
7/15/2012	4:25:03 PM	H2 MFC set to  0.000000
7/15/2012	4:25:03 PM	BCl3 MFC set to  0.000000
7/15/2012	4:25:03 PM	PH3 MFC set to  0.000000
7/15/2012	4:25:03 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:25:03 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:25:03 PM	Tube furnace set to 0
7/15/2012	4:26:03 PM	Helium valve closed
7/15/2012	4:26:03 PM	H2 valve closed
7/15/2012	4:26:03 PM	BCl3 valve closed
7/15/2012	4:26:03 PM	PH3 valve closed
7/15/2012	4:26:03 PM	SiCl4 pre valve closed
7/15/2012	4:26:03 PM	SiCl4 post valve closed
7/15/2012	4:26:03 PM	Bypass valve closed
7/15/2012	4:26:03 PM	Bubbler valve closed
7/15/2012	4:26:03 PM	Main Vac valve opened
7/15/2012	4:26:03 PM	Helium MFC set to  0.000000
7/15/2012	4:26:03 PM	H2 MFC set to  0.000000
7/15/2012	4:26:03 PM	BCl3 MFC set to  0.000000
7/15/2012	4:26:03 PM	PH3 MFC set to  0.000000
7/15/2012	4:26:03 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:26:03 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:26:04 PM	Tube furnace set to 0
7/15/2012	4:58:41 PM	Run aborted at 4:58 PM
7/15/2012	4:58:41 PM	Helium valve closed
7/15/2012	4:58:42 PM	H2 valve closed
7/15/2012	4:58:42 PM	BCl3 valve closed
7/15/2012	4:58:42 PM	PH3 valve closed
7/15/2012	4:58:42 PM	SiCl4 pre valve closed
7/15/2012	4:58:42 PM	SiCl4 post valve closed
7/15/2012	4:58:42 PM	Bypass valve closed
7/15/2012	4:58:42 PM	Main Vac valve closed
7/15/2012	4:58:42 PM	Bubbler valve closed
7/15/2012	4:58:42 PM	Helium MFC set to  0.000000
7/15/2012	4:58:42 PM	H2 MFC set to  0.000000
7/15/2012	4:58:42 PM	BCl3 MFC set to  0.000000
7/15/2012	4:58:42 PM	PH3 MFC set to  0.000000
7/15/2012	4:58:42 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:58:42 PM	Tube furnace set to 0
7/15/2012	4:58:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	4:58:44 PM	Recipe started at 4:58 PM
7/15/2012	4:58:45 PM	Helium valve closed
7/15/2012	4:58:45 PM	H2 valve closed
7/15/2012	4:58:45 PM	BCl3 valve closed
7/15/2012	4:58:45 PM	PH3 valve closed
7/15/2012	4:58:45 PM	SiCl4 pre valve closed
7/15/2012	4:58:45 PM	SiCl4 post valve closed
7/15/2012	4:58:45 PM	Main Vac valve closed
7/15/2012	4:58:45 PM	Bypass valve closed
7/15/2012	4:58:45 PM	Bubbler valve closed
7/15/2012	4:58:45 PM	Helium MFC set to  0.000000
7/15/2012	4:58:45 PM	H2 MFC set to  0.000000
7/15/2012	4:58:45 PM	BCl3 MFC set to  0.000000
7/15/2012	4:58:45 PM	PH3 MFC set to  0.000000
7/15/2012	4:58:45 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:58:45 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:58:45 PM	Tube furnace set to 0
7/15/2012	4:58:48 PM	H2 valve closed
7/15/2012	4:58:48 PM	BCl3 valve closed
7/15/2012	4:58:48 PM	PH3 valve closed
7/15/2012	4:58:48 PM	SiCl4 pre valve closed
7/15/2012	4:58:48 PM	SiCl4 post valve closed
7/15/2012	4:58:48 PM	Main Vac valve closed
7/15/2012	4:58:48 PM	Bypass valve closed
7/15/2012	4:58:48 PM	Bubbler valve closed
7/15/2012	4:58:48 PM	Helium valve opened
7/15/2012	4:58:48 PM	Helium MFC set to  500.000000
7/15/2012	4:58:48 PM	H2 MFC set to  0.000000
7/15/2012	4:58:48 PM	BCl3 MFC set to  0.000000
7/15/2012	4:58:48 PM	PH3 MFC set to  0.000000
7/15/2012	4:58:48 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:58:48 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:58:48 PM	Tube furnace set to 0
7/15/2012	4:59:59 PM	Helium valve closed
7/15/2012	4:59:59 PM	H2 valve closed
7/15/2012	4:59:59 PM	BCl3 valve closed
7/15/2012	4:59:59 PM	PH3 valve closed
7/15/2012	4:59:59 PM	SiCl4 pre valve closed
7/15/2012	4:59:59 PM	SiCl4 post valve closed
7/15/2012	4:59:59 PM	Main Vac valve closed
7/15/2012	4:59:59 PM	Bypass valve closed
7/15/2012	4:59:59 PM	Bubbler valve closed
7/15/2012	4:59:59 PM	Helium MFC set to  0.000000
7/15/2012	4:59:59 PM	H2 MFC set to  0.000000
7/15/2012	4:59:59 PM	BCl3 MFC set to  0.000000
7/15/2012	4:59:59 PM	PH3 MFC set to  0.000000
7/15/2012	4:59:59 PM	SiCl4 MFC set to  0.000000
7/15/2012	4:59:59 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	4:59:59 PM	Tube furnace set to 0
7/15/2012	5:00:00 PM	Run finished at 5:00 PM
7/15/2012	5:00:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	5:03:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	5:03:33 PM	Recipe started at 5:03 PM
7/15/2012	5:03:33 PM	Helium valve closed
7/15/2012	5:03:33 PM	H2 valve closed
7/15/2012	5:03:33 PM	BCl3 valve closed
7/15/2012	5:03:33 PM	PH3 valve closed
7/15/2012	5:03:33 PM	SiCl4 pre valve closed
7/15/2012	5:03:33 PM	SiCl4 post valve closed
7/15/2012	5:03:33 PM	Main Vac valve closed
7/15/2012	5:03:33 PM	Bubbler valve closed
7/15/2012	5:03:33 PM	Bypass valve opened
7/15/2012	5:03:33 PM	Helium MFC set to  0.000000
7/15/2012	5:03:33 PM	H2 MFC set to  0.000000
7/15/2012	5:03:33 PM	BCl3 MFC set to  0.000000
7/15/2012	5:03:33 PM	PH3 MFC set to  0.000000
7/15/2012	5:03:33 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:03:33 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:03:33 PM	Tube furnace set to 0
7/15/2012	5:04:44 PM	Helium valve closed
7/15/2012	5:04:44 PM	H2 valve closed
7/15/2012	5:04:44 PM	BCl3 valve closed
7/15/2012	5:04:44 PM	PH3 valve closed
7/15/2012	5:04:44 PM	SiCl4 pre valve closed
7/15/2012	5:04:44 PM	SiCl4 post valve closed
7/15/2012	5:04:44 PM	Main Vac valve closed
7/15/2012	5:04:44 PM	Bubbler valve closed
7/15/2012	5:04:44 PM	Bypass valve opened
7/15/2012	5:04:44 PM	Helium MFC set to  0.000000
7/15/2012	5:04:44 PM	H2 MFC set to  0.000000
7/15/2012	5:04:44 PM	BCl3 MFC set to  0.000000
7/15/2012	5:04:44 PM	PH3 MFC set to  0.000000
7/15/2012	5:04:44 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:04:44 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:04:44 PM	Tube furnace set to 0
7/15/2012	5:05:44 PM	Helium valve closed
7/15/2012	5:05:44 PM	H2 valve closed
7/15/2012	5:05:44 PM	BCl3 valve closed
7/15/2012	5:05:44 PM	PH3 valve closed
7/15/2012	5:05:44 PM	SiCl4 pre valve closed
7/15/2012	5:05:44 PM	SiCl4 post valve closed
7/15/2012	5:05:44 PM	Bypass valve closed
7/15/2012	5:05:44 PM	Bubbler valve closed
7/15/2012	5:05:44 PM	Main Vac valve opened
7/15/2012	5:05:44 PM	Helium MFC set to  0.000000
7/15/2012	5:05:44 PM	H2 MFC set to  0.000000
7/15/2012	5:05:44 PM	BCl3 MFC set to  0.000000
7/15/2012	5:05:44 PM	PH3 MFC set to  0.000000
7/15/2012	5:05:44 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:05:44 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:05:44 PM	Tube furnace set to 0
7/15/2012	5:05:45 PM	Run finished at 5:05 PM
7/15/2012	5:05:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	5:15:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	5:15:06 PM	Recipe started at 5:15 PM
7/15/2012	5:15:06 PM	Helium valve closed
7/15/2012	5:15:06 PM	H2 valve closed
7/15/2012	5:15:06 PM	BCl3 valve closed
7/15/2012	5:15:06 PM	PH3 valve closed
7/15/2012	5:15:06 PM	SiCl4 pre valve closed
7/15/2012	5:15:06 PM	SiCl4 post valve closed
7/15/2012	5:15:06 PM	Main Vac valve closed
7/15/2012	5:15:06 PM	Bypass valve closed
7/15/2012	5:15:06 PM	Bubbler valve closed
7/15/2012	5:15:06 PM	Helium MFC set to  0.000000
7/15/2012	5:15:06 PM	H2 MFC set to  0.000000
7/15/2012	5:15:06 PM	BCl3 MFC set to  0.000000
7/15/2012	5:15:06 PM	PH3 MFC set to  0.000000
7/15/2012	5:15:06 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:15:06 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:15:06 PM	Tube furnace set to 0
7/15/2012	5:15:09 PM	H2 valve closed
7/15/2012	5:15:09 PM	BCl3 valve closed
7/15/2012	5:15:09 PM	PH3 valve closed
7/15/2012	5:15:09 PM	SiCl4 pre valve closed
7/15/2012	5:15:09 PM	SiCl4 post valve closed
7/15/2012	5:15:09 PM	Main Vac valve closed
7/15/2012	5:15:09 PM	Bypass valve closed
7/15/2012	5:15:09 PM	Bubbler valve closed
7/15/2012	5:15:09 PM	Helium valve opened
7/15/2012	5:15:09 PM	Helium MFC set to  500.000000
7/15/2012	5:15:09 PM	H2 MFC set to  0.000000
7/15/2012	5:15:09 PM	BCl3 MFC set to  0.000000
7/15/2012	5:15:09 PM	PH3 MFC set to  0.000000
7/15/2012	5:15:09 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:15:09 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:15:10 PM	Tube furnace set to 0
7/15/2012	5:16:21 PM	Helium valve closed
7/15/2012	5:16:21 PM	H2 valve closed
7/15/2012	5:16:21 PM	BCl3 valve closed
7/15/2012	5:16:21 PM	PH3 valve closed
7/15/2012	5:16:21 PM	SiCl4 pre valve closed
7/15/2012	5:16:21 PM	SiCl4 post valve closed
7/15/2012	5:16:21 PM	Main Vac valve closed
7/15/2012	5:16:21 PM	Bypass valve closed
7/15/2012	5:16:21 PM	Bubbler valve closed
7/15/2012	5:16:21 PM	Helium MFC set to  0.000000
7/15/2012	5:16:21 PM	H2 MFC set to  0.000000
7/15/2012	5:16:21 PM	BCl3 MFC set to  0.000000
7/15/2012	5:16:21 PM	PH3 MFC set to  0.000000
7/15/2012	5:16:21 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:16:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:16:21 PM	Tube furnace set to 0
7/15/2012	5:16:22 PM	Run finished at 5:16 PM
7/15/2012	5:16:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	5:17:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	5:17:42 PM	Recipe started at 5:17 PM
7/15/2012	5:17:42 PM	Helium valve closed
7/15/2012	5:17:42 PM	H2 valve closed
7/15/2012	5:17:42 PM	BCl3 valve closed
7/15/2012	5:17:42 PM	PH3 valve closed
7/15/2012	5:17:42 PM	SiCl4 pre valve closed
7/15/2012	5:17:42 PM	SiCl4 post valve closed
7/15/2012	5:17:42 PM	Main Vac valve closed
7/15/2012	5:17:42 PM	Bubbler valve closed
7/15/2012	5:17:42 PM	Bypass valve opened
7/15/2012	5:17:42 PM	Helium MFC set to  0.000000
7/15/2012	5:17:42 PM	H2 MFC set to  0.000000
7/15/2012	5:17:42 PM	BCl3 MFC set to  0.000000
7/15/2012	5:17:42 PM	PH3 MFC set to  0.000000
7/15/2012	5:17:42 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:17:42 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:17:42 PM	Tube furnace set to 0
7/15/2012	5:18:48 PM	Helium valve closed
7/15/2012	5:18:48 PM	H2 valve closed
7/15/2012	5:18:48 PM	BCl3 valve closed
7/15/2012	5:18:48 PM	PH3 valve closed
7/15/2012	5:18:48 PM	SiCl4 pre valve closed
7/15/2012	5:18:48 PM	SiCl4 post valve closed
7/15/2012	5:18:48 PM	Main Vac valve closed
7/15/2012	5:18:48 PM	Bubbler valve closed
7/15/2012	5:18:48 PM	Bypass valve opened
7/15/2012	5:18:48 PM	Helium MFC set to  0.000000
7/15/2012	5:18:48 PM	H2 MFC set to  0.000000
7/15/2012	5:18:48 PM	BCl3 MFC set to  0.000000
7/15/2012	5:18:48 PM	PH3 MFC set to  0.000000
7/15/2012	5:18:48 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:18:48 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:18:48 PM	Tube furnace set to 0
7/15/2012	5:19:48 PM	Helium valve closed
7/15/2012	5:19:48 PM	H2 valve closed
7/15/2012	5:19:48 PM	BCl3 valve closed
7/15/2012	5:19:48 PM	PH3 valve closed
7/15/2012	5:19:48 PM	SiCl4 pre valve closed
7/15/2012	5:19:48 PM	SiCl4 post valve closed
7/15/2012	5:19:48 PM	Bypass valve closed
7/15/2012	5:19:48 PM	Bubbler valve closed
7/15/2012	5:19:48 PM	Main Vac valve opened
7/15/2012	5:19:48 PM	Helium MFC set to  0.000000
7/15/2012	5:19:48 PM	H2 MFC set to  0.000000
7/15/2012	5:19:48 PM	BCl3 MFC set to  0.000000
7/15/2012	5:19:48 PM	PH3 MFC set to  0.000000
7/15/2012	5:19:48 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:19:48 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:19:48 PM	Tube furnace set to 0
7/15/2012	5:19:49 PM	Run finished at 5:19 PM
7/15/2012	5:19:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	5:23:26 PM	Recipe started at 5:23 PM
7/15/2012	5:23:26 PM	Helium valve closed
7/15/2012	5:23:26 PM	H2 valve closed
7/15/2012	5:23:26 PM	BCl3 valve closed
7/15/2012	5:23:26 PM	PH3 valve closed
7/15/2012	5:23:26 PM	SiCl4 pre valve closed
7/15/2012	5:23:26 PM	SiCl4 post valve closed
7/15/2012	5:23:26 PM	Bypass valve closed
7/15/2012	5:23:26 PM	Bubbler valve closed
7/15/2012	5:23:26 PM	Main Vac valve opened
7/15/2012	5:23:26 PM	Helium MFC set to  0.000000
7/15/2012	5:23:26 PM	H2 MFC set to  0.000000
7/15/2012	5:23:26 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:26 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:26 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:26 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:26 PM	Tube furnace set to 0
7/15/2012	5:23:40 PM	H2 valve closed
7/15/2012	5:23:40 PM	BCl3 valve closed
7/15/2012	5:23:40 PM	PH3 valve closed
7/15/2012	5:23:40 PM	SiCl4 pre valve closed
7/15/2012	5:23:40 PM	SiCl4 post valve closed
7/15/2012	5:23:40 PM	Bypass valve closed
7/15/2012	5:23:40 PM	Bubbler valve closed
7/15/2012	5:23:40 PM	Helium valve opened
7/15/2012	5:23:40 PM	Main Vac valve opened
7/15/2012	5:23:40 PM	Helium MFC set to  20.000000
7/15/2012	5:23:40 PM	H2 MFC set to  0.000000
7/15/2012	5:23:40 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:40 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:40 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:40 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:40 PM	Tube furnace set to 0
7/15/2012	5:23:40 PM	Helium valve closed
7/15/2012	5:23:40 PM	H2 valve closed
7/15/2012	5:23:40 PM	BCl3 valve closed
7/15/2012	5:23:40 PM	PH3 valve closed
7/15/2012	5:23:40 PM	SiCl4 pre valve closed
7/15/2012	5:23:40 PM	SiCl4 post valve closed
7/15/2012	5:23:40 PM	Bypass valve closed
7/15/2012	5:23:40 PM	Bubbler valve closed
7/15/2012	5:23:40 PM	Main Vac valve opened
7/15/2012	5:23:40 PM	Helium MFC set to  0.000000
7/15/2012	5:23:40 PM	H2 MFC set to  0.000000
7/15/2012	5:23:40 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:40 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:40 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:40 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:41 PM	Tube furnace set to 0
7/15/2012	5:23:41 PM	H2 valve closed
7/15/2012	5:23:41 PM	BCl3 valve closed
7/15/2012	5:23:41 PM	PH3 valve closed
7/15/2012	5:23:41 PM	SiCl4 pre valve closed
7/15/2012	5:23:41 PM	SiCl4 post valve closed
7/15/2012	5:23:41 PM	Bypass valve closed
7/15/2012	5:23:41 PM	Bubbler valve closed
7/15/2012	5:23:41 PM	Helium valve opened
7/15/2012	5:23:41 PM	Main Vac valve opened
7/15/2012	5:23:41 PM	Helium MFC set to  20.000000
7/15/2012	5:23:41 PM	H2 MFC set to  0.000000
7/15/2012	5:23:41 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:41 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:41 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:41 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:41 PM	Tube furnace set to 0
7/15/2012	5:23:42 PM	Helium valve closed
7/15/2012	5:23:42 PM	H2 valve closed
7/15/2012	5:23:42 PM	BCl3 valve closed
7/15/2012	5:23:42 PM	PH3 valve closed
7/15/2012	5:23:42 PM	SiCl4 pre valve closed
7/15/2012	5:23:42 PM	SiCl4 post valve closed
7/15/2012	5:23:42 PM	Bypass valve closed
7/15/2012	5:23:42 PM	Bubbler valve closed
7/15/2012	5:23:42 PM	Main Vac valve opened
7/15/2012	5:23:42 PM	Helium MFC set to  0.000000
7/15/2012	5:23:42 PM	H2 MFC set to  0.000000
7/15/2012	5:23:42 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:42 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:42 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:42 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:42 PM	Tube furnace set to 0
7/15/2012	5:23:43 PM	H2 valve closed
7/15/2012	5:23:43 PM	BCl3 valve closed
7/15/2012	5:23:43 PM	PH3 valve closed
7/15/2012	5:23:43 PM	SiCl4 pre valve closed
7/15/2012	5:23:43 PM	SiCl4 post valve closed
7/15/2012	5:23:43 PM	Bypass valve closed
7/15/2012	5:23:43 PM	Bubbler valve closed
7/15/2012	5:23:43 PM	Helium valve opened
7/15/2012	5:23:43 PM	Main Vac valve opened
7/15/2012	5:23:43 PM	Helium MFC set to  20.000000
7/15/2012	5:23:43 PM	H2 MFC set to  0.000000
7/15/2012	5:23:43 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:43 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:43 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:43 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:43 PM	Tube furnace set to 0
7/15/2012	5:23:43 PM	Helium valve closed
7/15/2012	5:23:43 PM	H2 valve closed
7/15/2012	5:23:43 PM	BCl3 valve closed
7/15/2012	5:23:43 PM	PH3 valve closed
7/15/2012	5:23:43 PM	SiCl4 pre valve closed
7/15/2012	5:23:43 PM	SiCl4 post valve closed
7/15/2012	5:23:43 PM	Bypass valve closed
7/15/2012	5:23:43 PM	Bubbler valve closed
7/15/2012	5:23:43 PM	Main Vac valve opened
7/15/2012	5:23:43 PM	Helium MFC set to  0.000000
7/15/2012	5:23:43 PM	H2 MFC set to  0.000000
7/15/2012	5:23:43 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:43 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:43 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:43 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:43 PM	Tube furnace set to 0
7/15/2012	5:23:44 PM	H2 valve closed
7/15/2012	5:23:44 PM	BCl3 valve closed
7/15/2012	5:23:44 PM	PH3 valve closed
7/15/2012	5:23:44 PM	SiCl4 pre valve closed
7/15/2012	5:23:44 PM	SiCl4 post valve closed
7/15/2012	5:23:44 PM	Bypass valve closed
7/15/2012	5:23:44 PM	Bubbler valve closed
7/15/2012	5:23:44 PM	Helium valve opened
7/15/2012	5:23:44 PM	Main Vac valve opened
7/15/2012	5:23:44 PM	Helium MFC set to  20.000000
7/15/2012	5:23:44 PM	H2 MFC set to  0.000000
7/15/2012	5:23:44 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:44 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:44 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:44 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:44 PM	Tube furnace set to 0
7/15/2012	5:23:44 PM	Helium valve closed
7/15/2012	5:23:44 PM	H2 valve closed
7/15/2012	5:23:44 PM	BCl3 valve closed
7/15/2012	5:23:44 PM	PH3 valve closed
7/15/2012	5:23:44 PM	SiCl4 pre valve closed
7/15/2012	5:23:44 PM	SiCl4 post valve closed
7/15/2012	5:23:44 PM	Bypass valve closed
7/15/2012	5:23:44 PM	Bubbler valve closed
7/15/2012	5:23:44 PM	Main Vac valve opened
7/15/2012	5:23:44 PM	Helium MFC set to  0.000000
7/15/2012	5:23:44 PM	H2 MFC set to  0.000000
7/15/2012	5:23:44 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:44 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:44 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:44 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:45 PM	Tube furnace set to 0
7/15/2012	5:23:45 PM	H2 valve closed
7/15/2012	5:23:45 PM	BCl3 valve closed
7/15/2012	5:23:45 PM	PH3 valve closed
7/15/2012	5:23:45 PM	SiCl4 pre valve closed
7/15/2012	5:23:45 PM	SiCl4 post valve closed
7/15/2012	5:23:45 PM	Bypass valve closed
7/15/2012	5:23:45 PM	Bubbler valve closed
7/15/2012	5:23:45 PM	Helium valve opened
7/15/2012	5:23:45 PM	Main Vac valve opened
7/15/2012	5:23:45 PM	Helium MFC set to  20.000000
7/15/2012	5:23:45 PM	H2 MFC set to  0.000000
7/15/2012	5:23:45 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:45 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:45 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:45 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:46 PM	Tube furnace set to 0
7/15/2012	5:23:46 PM	Helium valve closed
7/15/2012	5:23:46 PM	H2 valve closed
7/15/2012	5:23:46 PM	BCl3 valve closed
7/15/2012	5:23:46 PM	PH3 valve closed
7/15/2012	5:23:46 PM	SiCl4 pre valve closed
7/15/2012	5:23:46 PM	SiCl4 post valve closed
7/15/2012	5:23:46 PM	Bypass valve closed
7/15/2012	5:23:46 PM	Bubbler valve closed
7/15/2012	5:23:46 PM	Main Vac valve opened
7/15/2012	5:23:46 PM	Helium MFC set to  0.000000
7/15/2012	5:23:46 PM	H2 MFC set to  0.000000
7/15/2012	5:23:46 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:46 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:46 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:46 PM	Tube furnace set to 0
7/15/2012	5:23:46 PM	H2 valve closed
7/15/2012	5:23:46 PM	BCl3 valve closed
7/15/2012	5:23:46 PM	PH3 valve closed
7/15/2012	5:23:46 PM	SiCl4 pre valve closed
7/15/2012	5:23:46 PM	SiCl4 post valve closed
7/15/2012	5:23:46 PM	Bypass valve closed
7/15/2012	5:23:46 PM	Bubbler valve closed
7/15/2012	5:23:46 PM	Helium valve opened
7/15/2012	5:23:46 PM	Main Vac valve opened
7/15/2012	5:23:46 PM	Helium MFC set to  20.000000
7/15/2012	5:23:46 PM	H2 MFC set to  0.000000
7/15/2012	5:23:46 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:46 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:46 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:46 PM	Tube furnace set to 0
7/15/2012	5:23:47 PM	Helium valve closed
7/15/2012	5:23:47 PM	H2 valve closed
7/15/2012	5:23:47 PM	BCl3 valve closed
7/15/2012	5:23:47 PM	PH3 valve closed
7/15/2012	5:23:47 PM	SiCl4 pre valve closed
7/15/2012	5:23:47 PM	SiCl4 post valve closed
7/15/2012	5:23:47 PM	Bypass valve closed
7/15/2012	5:23:47 PM	Bubbler valve closed
7/15/2012	5:23:47 PM	Main Vac valve opened
7/15/2012	5:23:47 PM	Helium MFC set to  0.000000
7/15/2012	5:23:47 PM	H2 MFC set to  0.000000
7/15/2012	5:23:47 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:47 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:47 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:47 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:47 PM	Tube furnace set to 0
7/15/2012	5:23:50 PM	H2 valve closed
7/15/2012	5:23:50 PM	BCl3 valve closed
7/15/2012	5:23:50 PM	PH3 valve closed
7/15/2012	5:23:50 PM	SiCl4 pre valve closed
7/15/2012	5:23:50 PM	SiCl4 post valve closed
7/15/2012	5:23:50 PM	Bypass valve closed
7/15/2012	5:23:50 PM	Bubbler valve closed
7/15/2012	5:23:50 PM	Helium valve opened
7/15/2012	5:23:50 PM	Main Vac valve opened
7/15/2012	5:23:50 PM	Helium MFC set to  20.000000
7/15/2012	5:23:50 PM	H2 MFC set to  0.000000
7/15/2012	5:23:50 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:50 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:50 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:50 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:50 PM	Tube furnace set to 0
7/15/2012	5:23:51 PM	Helium valve closed
7/15/2012	5:23:51 PM	H2 valve closed
7/15/2012	5:23:51 PM	BCl3 valve closed
7/15/2012	5:23:51 PM	PH3 valve closed
7/15/2012	5:23:51 PM	SiCl4 pre valve closed
7/15/2012	5:23:51 PM	SiCl4 post valve closed
7/15/2012	5:23:51 PM	Bypass valve closed
7/15/2012	5:23:51 PM	Bubbler valve closed
7/15/2012	5:23:51 PM	Main Vac valve opened
7/15/2012	5:23:51 PM	Helium MFC set to  0.000000
7/15/2012	5:23:51 PM	H2 MFC set to  0.000000
7/15/2012	5:23:51 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:51 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:51 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:51 PM	Tube furnace set to 0
7/15/2012	5:23:51 PM	H2 valve closed
7/15/2012	5:23:51 PM	BCl3 valve closed
7/15/2012	5:23:51 PM	PH3 valve closed
7/15/2012	5:23:51 PM	SiCl4 pre valve closed
7/15/2012	5:23:51 PM	SiCl4 post valve closed
7/15/2012	5:23:51 PM	Bypass valve closed
7/15/2012	5:23:51 PM	Bubbler valve closed
7/15/2012	5:23:51 PM	Helium valve opened
7/15/2012	5:23:52 PM	Main Vac valve opened
7/15/2012	5:23:52 PM	Helium MFC set to  20.000000
7/15/2012	5:23:52 PM	H2 MFC set to  0.000000
7/15/2012	5:23:52 PM	BCl3 MFC set to  0.000000
7/15/2012	5:23:52 PM	PH3 MFC set to  0.000000
7/15/2012	5:23:52 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:23:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:23:52 PM	Tube furnace set to 0
7/15/2012	5:24:22 PM	Helium valve closed
7/15/2012	5:24:22 PM	H2 valve closed
7/15/2012	5:24:22 PM	BCl3 valve closed
7/15/2012	5:24:22 PM	PH3 valve closed
7/15/2012	5:24:22 PM	SiCl4 pre valve closed
7/15/2012	5:24:22 PM	SiCl4 post valve closed
7/15/2012	5:24:22 PM	Bypass valve closed
7/15/2012	5:24:22 PM	Bubbler valve closed
7/15/2012	5:24:22 PM	Main Vac valve opened
7/15/2012	5:24:22 PM	Helium MFC set to  0.000000
7/15/2012	5:24:22 PM	H2 MFC set to  0.000000
7/15/2012	5:24:22 PM	BCl3 MFC set to  0.000000
7/15/2012	5:24:22 PM	PH3 MFC set to  0.000000
7/15/2012	5:24:22 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:24:22 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:24:22 PM	Tube furnace set to 0
7/15/2012	5:24:52 PM	H2 valve closed
7/15/2012	5:24:52 PM	BCl3 valve closed
7/15/2012	5:24:52 PM	PH3 valve closed
7/15/2012	5:24:52 PM	SiCl4 pre valve closed
7/15/2012	5:24:52 PM	SiCl4 post valve closed
7/15/2012	5:24:52 PM	Bypass valve closed
7/15/2012	5:24:52 PM	Bubbler valve closed
7/15/2012	5:24:52 PM	Helium valve opened
7/15/2012	5:24:52 PM	Main Vac valve opened
7/15/2012	5:24:52 PM	Helium MFC set to  20.000000
7/15/2012	5:24:52 PM	H2 MFC set to  0.000000
7/15/2012	5:24:52 PM	BCl3 MFC set to  0.000000
7/15/2012	5:24:52 PM	PH3 MFC set to  0.000000
7/15/2012	5:24:52 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:24:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:24:52 PM	Tube furnace set to 0
7/15/2012	5:25:22 PM	Helium valve closed
7/15/2012	5:25:22 PM	H2 valve closed
7/15/2012	5:25:22 PM	BCl3 valve closed
7/15/2012	5:25:22 PM	PH3 valve closed
7/15/2012	5:25:22 PM	SiCl4 pre valve closed
7/15/2012	5:25:22 PM	SiCl4 post valve closed
7/15/2012	5:25:22 PM	Bypass valve closed
7/15/2012	5:25:22 PM	Bubbler valve closed
7/15/2012	5:25:22 PM	Main Vac valve opened
7/15/2012	5:25:22 PM	Helium MFC set to  0.000000
7/15/2012	5:25:22 PM	H2 MFC set to  0.000000
7/15/2012	5:25:22 PM	BCl3 MFC set to  0.000000
7/15/2012	5:25:22 PM	PH3 MFC set to  0.000000
7/15/2012	5:25:22 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:25:22 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:25:22 PM	Tube furnace set to 200
7/15/2012	5:25:52 PM	H2 valve closed
7/15/2012	5:25:52 PM	BCl3 valve closed
7/15/2012	5:25:52 PM	PH3 valve closed
7/15/2012	5:25:52 PM	SiCl4 pre valve closed
7/15/2012	5:25:52 PM	SiCl4 post valve closed
7/15/2012	5:25:52 PM	Bypass valve closed
7/15/2012	5:25:52 PM	Bubbler valve closed
7/15/2012	5:25:52 PM	Helium valve opened
7/15/2012	5:25:52 PM	Main Vac valve opened
7/15/2012	5:25:52 PM	Helium MFC set to  20.000000
7/15/2012	5:25:52 PM	H2 MFC set to  0.000000
7/15/2012	5:25:52 PM	BCl3 MFC set to  0.000000
7/15/2012	5:25:52 PM	PH3 MFC set to  0.000000
7/15/2012	5:25:52 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:25:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:25:53 PM	Tube furnace set to 200
7/15/2012	5:26:23 PM	Helium valve closed
7/15/2012	5:26:23 PM	H2 valve closed
7/15/2012	5:26:23 PM	BCl3 valve closed
7/15/2012	5:26:23 PM	PH3 valve closed
7/15/2012	5:26:23 PM	SiCl4 pre valve closed
7/15/2012	5:26:23 PM	SiCl4 post valve closed
7/15/2012	5:26:23 PM	Bypass valve closed
7/15/2012	5:26:23 PM	Bubbler valve closed
7/15/2012	5:26:23 PM	Main Vac valve opened
7/15/2012	5:26:23 PM	Helium MFC set to  0.000000
7/15/2012	5:26:23 PM	H2 MFC set to  0.000000
7/15/2012	5:26:23 PM	BCl3 MFC set to  0.000000
7/15/2012	5:26:23 PM	PH3 MFC set to  0.000000
7/15/2012	5:26:23 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:26:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:26:23 PM	Tube furnace set to 200
7/15/2012	5:26:53 PM	H2 valve closed
7/15/2012	5:26:53 PM	BCl3 valve closed
7/15/2012	5:26:53 PM	PH3 valve closed
7/15/2012	5:26:53 PM	SiCl4 pre valve closed
7/15/2012	5:26:53 PM	SiCl4 post valve closed
7/15/2012	5:26:53 PM	Bypass valve closed
7/15/2012	5:26:53 PM	Bubbler valve closed
7/15/2012	5:26:53 PM	Helium valve opened
7/15/2012	5:26:53 PM	Main Vac valve opened
7/15/2012	5:26:53 PM	Helium MFC set to  20.000000
7/15/2012	5:26:53 PM	H2 MFC set to  0.000000
7/15/2012	5:26:53 PM	BCl3 MFC set to  0.000000
7/15/2012	5:26:53 PM	PH3 MFC set to  0.000000
7/15/2012	5:26:53 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:26:53 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:26:53 PM	Tube furnace set to 200
7/15/2012	5:27:23 PM	Helium valve closed
7/15/2012	5:27:23 PM	H2 valve closed
7/15/2012	5:27:23 PM	BCl3 valve closed
7/15/2012	5:27:23 PM	PH3 valve closed
7/15/2012	5:27:23 PM	SiCl4 pre valve closed
7/15/2012	5:27:23 PM	SiCl4 post valve closed
7/15/2012	5:27:23 PM	Bypass valve closed
7/15/2012	5:27:23 PM	Bubbler valve closed
7/15/2012	5:27:23 PM	Main Vac valve opened
7/15/2012	5:27:23 PM	Helium MFC set to  0.000000
7/15/2012	5:27:23 PM	H2 MFC set to  0.000000
7/15/2012	5:27:23 PM	BCl3 MFC set to  0.000000
7/15/2012	5:27:23 PM	PH3 MFC set to  0.000000
7/15/2012	5:27:23 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:27:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:27:23 PM	Tube furnace set to 200
7/15/2012	5:27:53 PM	H2 valve closed
7/15/2012	5:27:53 PM	BCl3 valve closed
7/15/2012	5:27:53 PM	PH3 valve closed
7/15/2012	5:27:53 PM	SiCl4 pre valve closed
7/15/2012	5:27:53 PM	SiCl4 post valve closed
7/15/2012	5:27:53 PM	Bypass valve closed
7/15/2012	5:27:53 PM	Bubbler valve closed
7/15/2012	5:27:53 PM	Helium valve opened
7/15/2012	5:27:53 PM	Main Vac valve opened
7/15/2012	5:27:53 PM	Helium MFC set to  20.000000
7/15/2012	5:27:53 PM	H2 MFC set to  0.000000
7/15/2012	5:27:53 PM	BCl3 MFC set to  0.000000
7/15/2012	5:27:53 PM	PH3 MFC set to  0.000000
7/15/2012	5:27:53 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:27:53 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:27:54 PM	Tube furnace set to 200
7/15/2012	5:28:24 PM	Helium valve closed
7/15/2012	5:28:24 PM	H2 valve closed
7/15/2012	5:28:24 PM	BCl3 valve closed
7/15/2012	5:28:24 PM	PH3 valve closed
7/15/2012	5:28:24 PM	SiCl4 pre valve closed
7/15/2012	5:28:24 PM	SiCl4 post valve closed
7/15/2012	5:28:24 PM	Bypass valve closed
7/15/2012	5:28:24 PM	Bubbler valve closed
7/15/2012	5:28:24 PM	Main Vac valve opened
7/15/2012	5:28:24 PM	Helium MFC set to  0.000000
7/15/2012	5:28:24 PM	H2 MFC set to  0.000000
7/15/2012	5:28:24 PM	BCl3 MFC set to  0.000000
7/15/2012	5:28:24 PM	PH3 MFC set to  0.000000
7/15/2012	5:28:24 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:28:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:28:24 PM	Tube furnace set to 200
7/15/2012	5:28:54 PM	H2 valve closed
7/15/2012	5:28:54 PM	BCl3 valve closed
7/15/2012	5:28:54 PM	PH3 valve closed
7/15/2012	5:28:54 PM	SiCl4 pre valve closed
7/15/2012	5:28:54 PM	SiCl4 post valve closed
7/15/2012	5:28:54 PM	Bypass valve closed
7/15/2012	5:28:54 PM	Bubbler valve closed
7/15/2012	5:28:54 PM	Helium valve opened
7/15/2012	5:28:54 PM	Main Vac valve opened
7/15/2012	5:28:54 PM	Helium MFC set to  20.000000
7/15/2012	5:28:54 PM	H2 MFC set to  0.000000
7/15/2012	5:28:54 PM	BCl3 MFC set to  0.000000
7/15/2012	5:28:54 PM	PH3 MFC set to  0.000000
7/15/2012	5:28:54 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:28:54 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:28:54 PM	Tube furnace set to 200
7/15/2012	5:29:24 PM	Helium valve closed
7/15/2012	5:29:24 PM	H2 valve closed
7/15/2012	5:29:24 PM	BCl3 valve closed
7/15/2012	5:29:24 PM	PH3 valve closed
7/15/2012	5:29:24 PM	SiCl4 pre valve closed
7/15/2012	5:29:24 PM	SiCl4 post valve closed
7/15/2012	5:29:24 PM	Bypass valve closed
7/15/2012	5:29:24 PM	Bubbler valve closed
7/15/2012	5:29:24 PM	Main Vac valve opened
7/15/2012	5:29:24 PM	Helium MFC set to  0.000000
7/15/2012	5:29:24 PM	H2 MFC set to  0.000000
7/15/2012	5:29:24 PM	BCl3 MFC set to  0.000000
7/15/2012	5:29:24 PM	PH3 MFC set to  0.000000
7/15/2012	5:29:24 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:29:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:29:24 PM	Tube furnace set to 200
7/15/2012	5:29:54 PM	H2 valve closed
7/15/2012	5:29:54 PM	BCl3 valve closed
7/15/2012	5:29:54 PM	PH3 valve closed
7/15/2012	5:29:54 PM	SiCl4 pre valve closed
7/15/2012	5:29:54 PM	SiCl4 post valve closed
7/15/2012	5:29:54 PM	Bypass valve closed
7/15/2012	5:29:54 PM	Bubbler valve closed
7/15/2012	5:29:54 PM	Helium valve opened
7/15/2012	5:29:54 PM	Main Vac valve opened
7/15/2012	5:29:54 PM	Helium MFC set to  20.000000
7/15/2012	5:29:54 PM	H2 MFC set to  0.000000
7/15/2012	5:29:54 PM	BCl3 MFC set to  0.000000
7/15/2012	5:29:54 PM	PH3 MFC set to  0.000000
7/15/2012	5:29:54 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:29:54 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:29:55 PM	Tube furnace set to 200
7/15/2012	5:30:25 PM	Helium valve closed
7/15/2012	5:30:25 PM	H2 valve closed
7/15/2012	5:30:25 PM	BCl3 valve closed
7/15/2012	5:30:25 PM	PH3 valve closed
7/15/2012	5:30:25 PM	SiCl4 pre valve closed
7/15/2012	5:30:25 PM	SiCl4 post valve closed
7/15/2012	5:30:25 PM	Bypass valve closed
7/15/2012	5:30:25 PM	Bubbler valve closed
7/15/2012	5:30:25 PM	Main Vac valve opened
7/15/2012	5:30:25 PM	Helium MFC set to  0.000000
7/15/2012	5:30:25 PM	H2 MFC set to  0.000000
7/15/2012	5:30:25 PM	BCl3 MFC set to  0.000000
7/15/2012	5:30:25 PM	PH3 MFC set to  0.000000
7/15/2012	5:30:25 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:30:25 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:30:25 PM	Tube furnace set to 200
7/15/2012	5:30:55 PM	H2 valve closed
7/15/2012	5:30:55 PM	BCl3 valve closed
7/15/2012	5:30:55 PM	PH3 valve closed
7/15/2012	5:30:55 PM	SiCl4 pre valve closed
7/15/2012	5:30:55 PM	SiCl4 post valve closed
7/15/2012	5:30:55 PM	Bypass valve closed
7/15/2012	5:30:55 PM	Bubbler valve closed
7/15/2012	5:30:55 PM	Helium valve opened
7/15/2012	5:30:55 PM	Main Vac valve opened
7/15/2012	5:30:55 PM	Helium MFC set to  20.000000
7/15/2012	5:30:55 PM	H2 MFC set to  0.000000
7/15/2012	5:30:55 PM	BCl3 MFC set to  0.000000
7/15/2012	5:30:55 PM	PH3 MFC set to  0.000000
7/15/2012	5:30:55 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:30:55 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:30:55 PM	Tube furnace set to 200
7/15/2012	5:31:25 PM	Helium valve closed
7/15/2012	5:31:25 PM	H2 valve closed
7/15/2012	5:31:25 PM	BCl3 valve closed
7/15/2012	5:31:25 PM	PH3 valve closed
7/15/2012	5:31:25 PM	SiCl4 pre valve closed
7/15/2012	5:31:25 PM	SiCl4 post valve closed
7/15/2012	5:31:25 PM	Bypass valve closed
7/15/2012	5:31:25 PM	Bubbler valve closed
7/15/2012	5:31:25 PM	Main Vac valve opened
7/15/2012	5:31:25 PM	Helium MFC set to  0.000000
7/15/2012	5:31:25 PM	H2 MFC set to  0.000000
7/15/2012	5:31:25 PM	BCl3 MFC set to  0.000000
7/15/2012	5:31:25 PM	PH3 MFC set to  0.000000
7/15/2012	5:31:25 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:31:25 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:31:25 PM	Tube furnace set to 0
7/15/2012	5:31:26 PM	Run finished at 5:31 PM
7/15/2012	5:33:59 PM	Main Vac valve closed
7/15/2012	5:34:05 PM	Main Vac valve opened
7/15/2012	5:34:18 PM	Recipe started at 5:34 PM
7/15/2012	5:34:18 PM	Helium valve closed
7/15/2012	5:34:18 PM	H2 valve closed
7/15/2012	5:34:18 PM	BCl3 valve closed
7/15/2012	5:34:18 PM	PH3 valve closed
7/15/2012	5:34:18 PM	SiCl4 pre valve closed
7/15/2012	5:34:18 PM	SiCl4 post valve closed
7/15/2012	5:34:18 PM	Bypass valve closed
7/15/2012	5:34:18 PM	Bubbler valve closed
7/15/2012	5:34:18 PM	Main Vac valve opened
7/15/2012	5:34:18 PM	Helium MFC set to  0.000000
7/15/2012	5:34:18 PM	H2 MFC set to  0.000000
7/15/2012	5:34:18 PM	BCl3 MFC set to  0.000000
7/15/2012	5:34:18 PM	PH3 MFC set to  0.000000
7/15/2012	5:34:18 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:34:18 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:34:19 PM	Tube furnace set to 0
7/15/2012	5:34:49 PM	H2 valve closed
7/15/2012	5:34:49 PM	BCl3 valve closed
7/15/2012	5:34:49 PM	PH3 valve closed
7/15/2012	5:34:49 PM	SiCl4 pre valve closed
7/15/2012	5:34:49 PM	SiCl4 post valve closed
7/15/2012	5:34:49 PM	Bypass valve closed
7/15/2012	5:34:49 PM	Bubbler valve closed
7/15/2012	5:34:49 PM	Helium valve opened
7/15/2012	5:34:49 PM	Main Vac valve opened
7/15/2012	5:34:49 PM	Helium MFC set to  20.000000
7/15/2012	5:34:49 PM	H2 MFC set to  0.000000
7/15/2012	5:34:49 PM	BCl3 MFC set to  0.000000
7/15/2012	5:34:49 PM	PH3 MFC set to  0.000000
7/15/2012	5:34:49 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:34:49 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:34:49 PM	Tube furnace set to 0
7/15/2012	5:35:19 PM	Helium valve closed
7/15/2012	5:35:19 PM	H2 valve closed
7/15/2012	5:35:19 PM	BCl3 valve closed
7/15/2012	5:35:19 PM	PH3 valve closed
7/15/2012	5:35:19 PM	SiCl4 pre valve closed
7/15/2012	5:35:19 PM	SiCl4 post valve closed
7/15/2012	5:35:19 PM	Bypass valve closed
7/15/2012	5:35:19 PM	Bubbler valve closed
7/15/2012	5:35:19 PM	Main Vac valve opened
7/15/2012	5:35:19 PM	Helium MFC set to  0.000000
7/15/2012	5:35:19 PM	H2 MFC set to  0.000000
7/15/2012	5:35:19 PM	BCl3 MFC set to  0.000000
7/15/2012	5:35:19 PM	PH3 MFC set to  0.000000
7/15/2012	5:35:19 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:35:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:35:19 PM	Tube furnace set to 0
7/15/2012	5:35:49 PM	H2 valve closed
7/15/2012	5:35:49 PM	BCl3 valve closed
7/15/2012	5:35:49 PM	PH3 valve closed
7/15/2012	5:35:49 PM	SiCl4 pre valve closed
7/15/2012	5:35:49 PM	SiCl4 post valve closed
7/15/2012	5:35:49 PM	Bypass valve closed
7/15/2012	5:35:49 PM	Bubbler valve closed
7/15/2012	5:35:49 PM	Helium valve opened
7/15/2012	5:35:49 PM	Main Vac valve opened
7/15/2012	5:35:49 PM	Helium MFC set to  20.000000
7/15/2012	5:35:49 PM	H2 MFC set to  0.000000
7/15/2012	5:35:49 PM	BCl3 MFC set to  0.000000
7/15/2012	5:35:49 PM	PH3 MFC set to  0.000000
7/15/2012	5:35:49 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:35:49 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:35:49 PM	Tube furnace set to 0
7/15/2012	5:36:19 PM	Helium valve closed
7/15/2012	5:36:19 PM	H2 valve closed
7/15/2012	5:36:19 PM	BCl3 valve closed
7/15/2012	5:36:19 PM	PH3 valve closed
7/15/2012	5:36:19 PM	SiCl4 pre valve closed
7/15/2012	5:36:19 PM	SiCl4 post valve closed
7/15/2012	5:36:19 PM	Bypass valve closed
7/15/2012	5:36:19 PM	Bubbler valve closed
7/15/2012	5:36:19 PM	Main Vac valve opened
7/15/2012	5:36:19 PM	Helium MFC set to  0.000000
7/15/2012	5:36:19 PM	H2 MFC set to  0.000000
7/15/2012	5:36:19 PM	BCl3 MFC set to  0.000000
7/15/2012	5:36:19 PM	PH3 MFC set to  0.000000
7/15/2012	5:36:19 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:36:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:36:20 PM	Tube furnace set to 0
7/15/2012	5:36:50 PM	H2 valve closed
7/15/2012	5:36:50 PM	BCl3 valve closed
7/15/2012	5:36:50 PM	PH3 valve closed
7/15/2012	5:36:50 PM	SiCl4 pre valve closed
7/15/2012	5:36:50 PM	SiCl4 post valve closed
7/15/2012	5:36:50 PM	Bypass valve closed
7/15/2012	5:36:50 PM	Bubbler valve closed
7/15/2012	5:36:50 PM	Helium valve opened
7/15/2012	5:36:50 PM	Main Vac valve opened
7/15/2012	5:36:50 PM	Helium MFC set to  20.000000
7/15/2012	5:36:50 PM	H2 MFC set to  0.000000
7/15/2012	5:36:50 PM	BCl3 MFC set to  0.000000
7/15/2012	5:36:50 PM	PH3 MFC set to  0.000000
7/15/2012	5:36:50 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:36:50 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:36:50 PM	Tube furnace set to 0
7/15/2012	5:37:20 PM	Helium valve closed
7/15/2012	5:37:20 PM	H2 valve closed
7/15/2012	5:37:20 PM	BCl3 valve closed
7/15/2012	5:37:20 PM	PH3 valve closed
7/15/2012	5:37:20 PM	SiCl4 pre valve closed
7/15/2012	5:37:20 PM	SiCl4 post valve closed
7/15/2012	5:37:20 PM	Bypass valve closed
7/15/2012	5:37:20 PM	Bubbler valve closed
7/15/2012	5:37:20 PM	Main Vac valve opened
7/15/2012	5:37:20 PM	Helium MFC set to  0.000000
7/15/2012	5:37:20 PM	H2 MFC set to  0.000000
7/15/2012	5:37:20 PM	BCl3 MFC set to  0.000000
7/15/2012	5:37:20 PM	PH3 MFC set to  0.000000
7/15/2012	5:37:20 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:37:20 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:37:20 PM	Tube furnace set to 0
7/15/2012	5:37:50 PM	H2 valve closed
7/15/2012	5:37:50 PM	BCl3 valve closed
7/15/2012	5:37:50 PM	PH3 valve closed
7/15/2012	5:37:50 PM	SiCl4 pre valve closed
7/15/2012	5:37:50 PM	SiCl4 post valve closed
7/15/2012	5:37:50 PM	Bypass valve closed
7/15/2012	5:37:50 PM	Bubbler valve closed
7/15/2012	5:37:50 PM	Helium valve opened
7/15/2012	5:37:50 PM	Main Vac valve opened
7/15/2012	5:37:50 PM	Helium MFC set to  20.000000
7/15/2012	5:37:50 PM	H2 MFC set to  0.000000
7/15/2012	5:37:50 PM	BCl3 MFC set to  0.000000
7/15/2012	5:37:50 PM	PH3 MFC set to  0.000000
7/15/2012	5:37:50 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:37:50 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:37:50 PM	Tube furnace set to 0
7/15/2012	5:38:20 PM	Helium valve closed
7/15/2012	5:38:20 PM	H2 valve closed
7/15/2012	5:38:20 PM	BCl3 valve closed
7/15/2012	5:38:20 PM	PH3 valve closed
7/15/2012	5:38:20 PM	SiCl4 pre valve closed
7/15/2012	5:38:20 PM	SiCl4 post valve closed
7/15/2012	5:38:20 PM	Bypass valve closed
7/15/2012	5:38:20 PM	Bubbler valve closed
7/15/2012	5:38:20 PM	Main Vac valve opened
7/15/2012	5:38:20 PM	Helium MFC set to  0.000000
7/15/2012	5:38:20 PM	H2 MFC set to  0.000000
7/15/2012	5:38:20 PM	BCl3 MFC set to  0.000000
7/15/2012	5:38:20 PM	PH3 MFC set to  0.000000
7/15/2012	5:38:20 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:38:20 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:38:21 PM	Tube furnace set to 0
7/15/2012	5:38:51 PM	H2 valve closed
7/15/2012	5:38:51 PM	BCl3 valve closed
7/15/2012	5:38:51 PM	PH3 valve closed
7/15/2012	5:38:51 PM	SiCl4 pre valve closed
7/15/2012	5:38:51 PM	SiCl4 post valve closed
7/15/2012	5:38:51 PM	Bypass valve closed
7/15/2012	5:38:51 PM	Bubbler valve closed
7/15/2012	5:38:51 PM	Helium valve opened
7/15/2012	5:38:51 PM	Main Vac valve opened
7/15/2012	5:38:51 PM	Helium MFC set to  20.000000
7/15/2012	5:38:51 PM	H2 MFC set to  0.000000
7/15/2012	5:38:51 PM	BCl3 MFC set to  0.000000
7/15/2012	5:38:51 PM	PH3 MFC set to  0.000000
7/15/2012	5:38:51 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:38:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:38:51 PM	Tube furnace set to 0
7/15/2012	5:39:21 PM	Helium valve closed
7/15/2012	5:39:21 PM	H2 valve closed
7/15/2012	5:39:21 PM	BCl3 valve closed
7/15/2012	5:39:21 PM	PH3 valve closed
7/15/2012	5:39:21 PM	SiCl4 pre valve closed
7/15/2012	5:39:21 PM	SiCl4 post valve closed
7/15/2012	5:39:21 PM	Bypass valve closed
7/15/2012	5:39:21 PM	Bubbler valve closed
7/15/2012	5:39:21 PM	Main Vac valve opened
7/15/2012	5:39:21 PM	Helium MFC set to  0.000000
7/15/2012	5:39:21 PM	H2 MFC set to  0.000000
7/15/2012	5:39:21 PM	BCl3 MFC set to  0.000000
7/15/2012	5:39:21 PM	PH3 MFC set to  0.000000
7/15/2012	5:39:21 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:39:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:39:21 PM	Tube furnace set to 0
7/15/2012	5:39:51 PM	H2 valve closed
7/15/2012	5:39:51 PM	BCl3 valve closed
7/15/2012	5:39:51 PM	PH3 valve closed
7/15/2012	5:39:51 PM	SiCl4 pre valve closed
7/15/2012	5:39:51 PM	SiCl4 post valve closed
7/15/2012	5:39:51 PM	Bypass valve closed
7/15/2012	5:39:51 PM	Bubbler valve closed
7/15/2012	5:39:51 PM	Helium valve opened
7/15/2012	5:39:51 PM	Main Vac valve opened
7/15/2012	5:39:51 PM	Helium MFC set to  20.000000
7/15/2012	5:39:51 PM	H2 MFC set to  0.000000
7/15/2012	5:39:51 PM	BCl3 MFC set to  0.000000
7/15/2012	5:39:51 PM	PH3 MFC set to  0.000000
7/15/2012	5:39:51 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:39:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:39:51 PM	Tube furnace set to 0
7/15/2012	5:40:21 PM	Helium valve closed
7/15/2012	5:40:21 PM	H2 valve closed
7/15/2012	5:40:21 PM	BCl3 valve closed
7/15/2012	5:40:21 PM	PH3 valve closed
7/15/2012	5:40:21 PM	SiCl4 pre valve closed
7/15/2012	5:40:21 PM	SiCl4 post valve closed
7/15/2012	5:40:21 PM	Bypass valve closed
7/15/2012	5:40:21 PM	Bubbler valve closed
7/15/2012	5:40:21 PM	Main Vac valve opened
7/15/2012	5:40:21 PM	Helium MFC set to  0.000000
7/15/2012	5:40:21 PM	H2 MFC set to  0.000000
7/15/2012	5:40:21 PM	BCl3 MFC set to  0.000000
7/15/2012	5:40:21 PM	PH3 MFC set to  0.000000
7/15/2012	5:40:21 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:40:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:40:21 PM	Tube furnace set to 0
7/15/2012	5:40:51 PM	H2 valve closed
7/15/2012	5:40:51 PM	BCl3 valve closed
7/15/2012	5:40:51 PM	PH3 valve closed
7/15/2012	5:40:51 PM	SiCl4 pre valve closed
7/15/2012	5:40:51 PM	SiCl4 post valve closed
7/15/2012	5:40:51 PM	Bypass valve closed
7/15/2012	5:40:52 PM	Bubbler valve closed
7/15/2012	5:40:52 PM	Helium valve opened
7/15/2012	5:40:52 PM	Main Vac valve opened
7/15/2012	5:40:52 PM	Helium MFC set to  20.000000
7/15/2012	5:40:52 PM	H2 MFC set to  0.000000
7/15/2012	5:40:52 PM	BCl3 MFC set to  0.000000
7/15/2012	5:40:52 PM	PH3 MFC set to  0.000000
7/15/2012	5:40:52 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:40:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:40:52 PM	Tube furnace set to 0
7/15/2012	5:41:22 PM	Helium valve closed
7/15/2012	5:41:22 PM	H2 valve closed
7/15/2012	5:41:22 PM	BCl3 valve closed
7/15/2012	5:41:22 PM	PH3 valve closed
7/15/2012	5:41:22 PM	SiCl4 pre valve closed
7/15/2012	5:41:22 PM	SiCl4 post valve closed
7/15/2012	5:41:22 PM	Bypass valve closed
7/15/2012	5:41:22 PM	Bubbler valve closed
7/15/2012	5:41:22 PM	Main Vac valve opened
7/15/2012	5:41:22 PM	Helium MFC set to  0.000000
7/15/2012	5:41:22 PM	H2 MFC set to  0.000000
7/15/2012	5:41:22 PM	BCl3 MFC set to  0.000000
7/15/2012	5:41:22 PM	PH3 MFC set to  0.000000
7/15/2012	5:41:22 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:41:22 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:41:22 PM	Tube furnace set to 0
7/15/2012	5:41:52 PM	H2 valve closed
7/15/2012	5:41:52 PM	BCl3 valve closed
7/15/2012	5:41:52 PM	PH3 valve closed
7/15/2012	5:41:52 PM	SiCl4 pre valve closed
7/15/2012	5:41:52 PM	SiCl4 post valve closed
7/15/2012	5:41:52 PM	Bypass valve closed
7/15/2012	5:41:52 PM	Bubbler valve closed
7/15/2012	5:41:52 PM	Helium valve opened
7/15/2012	5:41:52 PM	Main Vac valve opened
7/15/2012	5:41:52 PM	Helium MFC set to  20.000000
7/15/2012	5:41:52 PM	H2 MFC set to  0.000000
7/15/2012	5:41:52 PM	BCl3 MFC set to  0.000000
7/15/2012	5:41:52 PM	PH3 MFC set to  0.000000
7/15/2012	5:41:52 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:41:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:41:52 PM	Tube furnace set to 0
7/15/2012	5:42:22 PM	Helium valve closed
7/15/2012	5:42:22 PM	H2 valve closed
7/15/2012	5:42:22 PM	BCl3 valve closed
7/15/2012	5:42:22 PM	PH3 valve closed
7/15/2012	5:42:22 PM	SiCl4 pre valve closed
7/15/2012	5:42:22 PM	SiCl4 post valve closed
7/15/2012	5:42:22 PM	Bypass valve closed
7/15/2012	5:42:22 PM	Bubbler valve closed
7/15/2012	5:42:22 PM	Main Vac valve opened
7/15/2012	5:42:22 PM	Helium MFC set to  0.000000
7/15/2012	5:42:22 PM	H2 MFC set to  0.000000
7/15/2012	5:42:22 PM	BCl3 MFC set to  0.000000
7/15/2012	5:42:22 PM	PH3 MFC set to  0.000000
7/15/2012	5:42:22 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:42:22 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:42:22 PM	Tube furnace set to 0
7/15/2012	5:42:52 PM	H2 valve closed
7/15/2012	5:42:52 PM	BCl3 valve closed
7/15/2012	5:42:52 PM	PH3 valve closed
7/15/2012	5:42:52 PM	SiCl4 pre valve closed
7/15/2012	5:42:52 PM	SiCl4 post valve closed
7/15/2012	5:42:52 PM	Bypass valve closed
7/15/2012	5:42:52 PM	Bubbler valve closed
7/15/2012	5:42:52 PM	Helium valve opened
7/15/2012	5:42:52 PM	Main Vac valve opened
7/15/2012	5:42:52 PM	Helium MFC set to  20.000000
7/15/2012	5:42:52 PM	H2 MFC set to  0.000000
7/15/2012	5:42:52 PM	BCl3 MFC set to  0.000000
7/15/2012	5:42:53 PM	PH3 MFC set to  0.000000
7/15/2012	5:42:53 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:42:53 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:42:53 PM	Tube furnace set to 0
7/15/2012	5:43:23 PM	Helium valve closed
7/15/2012	5:43:23 PM	H2 valve closed
7/15/2012	5:43:23 PM	BCl3 valve closed
7/15/2012	5:43:23 PM	PH3 valve closed
7/15/2012	5:43:23 PM	SiCl4 pre valve closed
7/15/2012	5:43:23 PM	SiCl4 post valve closed
7/15/2012	5:43:23 PM	Bypass valve closed
7/15/2012	5:43:23 PM	Bubbler valve closed
7/15/2012	5:43:23 PM	Main Vac valve opened
7/15/2012	5:43:23 PM	Helium MFC set to  0.000000
7/15/2012	5:43:23 PM	H2 MFC set to  0.000000
7/15/2012	5:43:23 PM	BCl3 MFC set to  0.000000
7/15/2012	5:43:23 PM	PH3 MFC set to  0.000000
7/15/2012	5:43:23 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:43:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:43:23 PM	Tube furnace set to 200
7/15/2012	5:43:53 PM	H2 valve closed
7/15/2012	5:43:53 PM	BCl3 valve closed
7/15/2012	5:43:53 PM	PH3 valve closed
7/15/2012	5:43:53 PM	SiCl4 pre valve closed
7/15/2012	5:43:53 PM	SiCl4 post valve closed
7/15/2012	5:43:53 PM	Bypass valve closed
7/15/2012	5:43:53 PM	Bubbler valve closed
7/15/2012	5:43:53 PM	Helium valve opened
7/15/2012	5:43:53 PM	Main Vac valve opened
7/15/2012	5:43:53 PM	Helium MFC set to  20.000000
7/15/2012	5:43:53 PM	H2 MFC set to  0.000000
7/15/2012	5:43:53 PM	BCl3 MFC set to  0.000000
7/15/2012	5:43:53 PM	PH3 MFC set to  0.000000
7/15/2012	5:43:53 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:43:53 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:43:53 PM	Tube furnace set to 200
7/15/2012	5:44:23 PM	Helium valve closed
7/15/2012	5:44:23 PM	H2 valve closed
7/15/2012	5:44:23 PM	BCl3 valve closed
7/15/2012	5:44:23 PM	PH3 valve closed
7/15/2012	5:44:23 PM	SiCl4 pre valve closed
7/15/2012	5:44:23 PM	SiCl4 post valve closed
7/15/2012	5:44:23 PM	Bypass valve closed
7/15/2012	5:44:23 PM	Bubbler valve closed
7/15/2012	5:44:23 PM	Main Vac valve opened
7/15/2012	5:44:23 PM	Helium MFC set to  0.000000
7/15/2012	5:44:23 PM	H2 MFC set to  0.000000
7/15/2012	5:44:23 PM	BCl3 MFC set to  0.000000
7/15/2012	5:44:23 PM	PH3 MFC set to  0.000000
7/15/2012	5:44:23 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:44:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:44:23 PM	Tube furnace set to 200
7/15/2012	5:44:53 PM	H2 valve closed
7/15/2012	5:44:53 PM	BCl3 valve closed
7/15/2012	5:44:53 PM	PH3 valve closed
7/15/2012	5:44:53 PM	SiCl4 pre valve closed
7/15/2012	5:44:53 PM	SiCl4 post valve closed
7/15/2012	5:44:53 PM	Bypass valve closed
7/15/2012	5:44:53 PM	Bubbler valve closed
7/15/2012	5:44:53 PM	Helium valve opened
7/15/2012	5:44:53 PM	Main Vac valve opened
7/15/2012	5:44:53 PM	Helium MFC set to  20.000000
7/15/2012	5:44:53 PM	H2 MFC set to  0.000000
7/15/2012	5:44:53 PM	BCl3 MFC set to  0.000000
7/15/2012	5:44:53 PM	PH3 MFC set to  0.000000
7/15/2012	5:44:53 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:44:53 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:44:54 PM	Tube furnace set to 200
7/15/2012	5:45:24 PM	Helium valve closed
7/15/2012	5:45:24 PM	H2 valve closed
7/15/2012	5:45:24 PM	BCl3 valve closed
7/15/2012	5:45:24 PM	PH3 valve closed
7/15/2012	5:45:24 PM	SiCl4 pre valve closed
7/15/2012	5:45:24 PM	SiCl4 post valve closed
7/15/2012	5:45:24 PM	Bypass valve closed
7/15/2012	5:45:24 PM	Bubbler valve closed
7/15/2012	5:45:24 PM	Main Vac valve opened
7/15/2012	5:45:24 PM	Helium MFC set to  0.000000
7/15/2012	5:45:24 PM	H2 MFC set to  0.000000
7/15/2012	5:45:24 PM	BCl3 MFC set to  0.000000
7/15/2012	5:45:24 PM	PH3 MFC set to  0.000000
7/15/2012	5:45:24 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:45:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:45:24 PM	Tube furnace set to 200
7/15/2012	5:45:54 PM	H2 valve closed
7/15/2012	5:45:54 PM	BCl3 valve closed
7/15/2012	5:45:54 PM	PH3 valve closed
7/15/2012	5:45:54 PM	SiCl4 pre valve closed
7/15/2012	5:45:54 PM	SiCl4 post valve closed
7/15/2012	5:45:54 PM	Bypass valve closed
7/15/2012	5:45:54 PM	Bubbler valve closed
7/15/2012	5:45:54 PM	Helium valve opened
7/15/2012	5:45:54 PM	Main Vac valve opened
7/15/2012	5:45:54 PM	Helium MFC set to  20.000000
7/15/2012	5:45:54 PM	H2 MFC set to  0.000000
7/15/2012	5:45:54 PM	BCl3 MFC set to  0.000000
7/15/2012	5:45:54 PM	PH3 MFC set to  0.000000
7/15/2012	5:45:54 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:45:54 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:45:54 PM	Tube furnace set to 200
7/15/2012	5:46:24 PM	Helium valve closed
7/15/2012	5:46:24 PM	H2 valve closed
7/15/2012	5:46:24 PM	BCl3 valve closed
7/15/2012	5:46:24 PM	PH3 valve closed
7/15/2012	5:46:24 PM	SiCl4 pre valve closed
7/15/2012	5:46:24 PM	SiCl4 post valve closed
7/15/2012	5:46:24 PM	Bypass valve closed
7/15/2012	5:46:24 PM	Bubbler valve closed
7/15/2012	5:46:24 PM	Main Vac valve opened
7/15/2012	5:46:24 PM	Helium MFC set to  0.000000
7/15/2012	5:46:24 PM	H2 MFC set to  0.000000
7/15/2012	5:46:24 PM	BCl3 MFC set to  0.000000
7/15/2012	5:46:24 PM	PH3 MFC set to  0.000000
7/15/2012	5:46:24 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:46:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:46:24 PM	Tube furnace set to 200
7/15/2012	5:46:54 PM	H2 valve closed
7/15/2012	5:46:54 PM	BCl3 valve closed
7/15/2012	5:46:54 PM	PH3 valve closed
7/15/2012	5:46:54 PM	SiCl4 pre valve closed
7/15/2012	5:46:54 PM	SiCl4 post valve closed
7/15/2012	5:46:54 PM	Bypass valve closed
7/15/2012	5:46:54 PM	Bubbler valve closed
7/15/2012	5:46:54 PM	Helium valve opened
7/15/2012	5:46:54 PM	Main Vac valve opened
7/15/2012	5:46:54 PM	Helium MFC set to  20.000000
7/15/2012	5:46:54 PM	H2 MFC set to  0.000000
7/15/2012	5:46:54 PM	BCl3 MFC set to  0.000000
7/15/2012	5:46:54 PM	PH3 MFC set to  0.000000
7/15/2012	5:46:54 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:46:54 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:46:55 PM	Tube furnace set to 200
7/15/2012	5:47:25 PM	Helium valve closed
7/15/2012	5:47:25 PM	H2 valve closed
7/15/2012	5:47:25 PM	BCl3 valve closed
7/15/2012	5:47:25 PM	PH3 valve closed
7/15/2012	5:47:25 PM	SiCl4 pre valve closed
7/15/2012	5:47:25 PM	SiCl4 post valve closed
7/15/2012	5:47:25 PM	Bypass valve closed
7/15/2012	5:47:25 PM	Bubbler valve closed
7/15/2012	5:47:25 PM	Main Vac valve opened
7/15/2012	5:47:25 PM	Helium MFC set to  0.000000
7/15/2012	5:47:25 PM	H2 MFC set to  0.000000
7/15/2012	5:47:25 PM	BCl3 MFC set to  0.000000
7/15/2012	5:47:25 PM	PH3 MFC set to  0.000000
7/15/2012	5:47:25 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:47:25 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:47:25 PM	Tube furnace set to 200
7/15/2012	5:47:55 PM	H2 valve closed
7/15/2012	5:47:55 PM	BCl3 valve closed
7/15/2012	5:47:55 PM	PH3 valve closed
7/15/2012	5:47:55 PM	SiCl4 pre valve closed
7/15/2012	5:47:55 PM	SiCl4 post valve closed
7/15/2012	5:47:55 PM	Bypass valve closed
7/15/2012	5:47:55 PM	Bubbler valve closed
7/15/2012	5:47:55 PM	Helium valve opened
7/15/2012	5:47:55 PM	Main Vac valve opened
7/15/2012	5:47:55 PM	Helium MFC set to  20.000000
7/15/2012	5:47:55 PM	H2 MFC set to  0.000000
7/15/2012	5:47:55 PM	BCl3 MFC set to  0.000000
7/15/2012	5:47:55 PM	PH3 MFC set to  0.000000
7/15/2012	5:47:55 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:47:55 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:47:55 PM	Tube furnace set to 200
7/15/2012	5:48:25 PM	Helium valve closed
7/15/2012	5:48:25 PM	H2 valve closed
7/15/2012	5:48:25 PM	BCl3 valve closed
7/15/2012	5:48:25 PM	PH3 valve closed
7/15/2012	5:48:25 PM	SiCl4 pre valve closed
7/15/2012	5:48:25 PM	SiCl4 post valve closed
7/15/2012	5:48:25 PM	Bypass valve closed
7/15/2012	5:48:25 PM	Bubbler valve closed
7/15/2012	5:48:25 PM	Main Vac valve opened
7/15/2012	5:48:25 PM	Helium MFC set to  0.000000
7/15/2012	5:48:25 PM	H2 MFC set to  0.000000
7/15/2012	5:48:25 PM	BCl3 MFC set to  0.000000
7/15/2012	5:48:25 PM	PH3 MFC set to  0.000000
7/15/2012	5:48:25 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:48:25 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:48:25 PM	Tube furnace set to 200
7/15/2012	5:48:55 PM	H2 valve closed
7/15/2012	5:48:55 PM	BCl3 valve closed
7/15/2012	5:48:55 PM	PH3 valve closed
7/15/2012	5:48:55 PM	SiCl4 pre valve closed
7/15/2012	5:48:55 PM	SiCl4 post valve closed
7/15/2012	5:48:55 PM	Bypass valve closed
7/15/2012	5:48:55 PM	Bubbler valve closed
7/15/2012	5:48:55 PM	Helium valve opened
7/15/2012	5:48:55 PM	Main Vac valve opened
7/15/2012	5:48:55 PM	Helium MFC set to  20.000000
7/15/2012	5:48:55 PM	H2 MFC set to  0.000000
7/15/2012	5:48:55 PM	BCl3 MFC set to  0.000000
7/15/2012	5:48:55 PM	PH3 MFC set to  0.000000
7/15/2012	5:48:55 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:48:55 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:48:56 PM	Tube furnace set to 200
7/15/2012	5:49:26 PM	Helium valve closed
7/15/2012	5:49:26 PM	H2 valve closed
7/15/2012	5:49:26 PM	BCl3 valve closed
7/15/2012	5:49:26 PM	PH3 valve closed
7/15/2012	5:49:26 PM	SiCl4 pre valve closed
7/15/2012	5:49:26 PM	SiCl4 post valve closed
7/15/2012	5:49:26 PM	Bypass valve closed
7/15/2012	5:49:26 PM	Bubbler valve closed
7/15/2012	5:49:26 PM	Main Vac valve opened
7/15/2012	5:49:26 PM	Helium MFC set to  0.000000
7/15/2012	5:49:26 PM	H2 MFC set to  0.000000
7/15/2012	5:49:26 PM	BCl3 MFC set to  0.000000
7/15/2012	5:49:26 PM	PH3 MFC set to  0.000000
7/15/2012	5:49:26 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:49:26 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:49:26 PM	Tube furnace set to 0
7/15/2012	5:49:27 PM	Run finished at 5:49 PM
7/15/2012	5:54:33 PM	Main Vac valve closed
7/15/2012	5:54:52 PM	Main Vac valve opened
7/15/2012	5:56:45 PM	Recipe started at 5:56 PM
7/15/2012	5:56:45 PM	Helium valve closed
7/15/2012	5:56:45 PM	H2 valve closed
7/15/2012	5:56:45 PM	BCl3 valve closed
7/15/2012	5:56:45 PM	PH3 valve closed
7/15/2012	5:56:45 PM	SiCl4 pre valve closed
7/15/2012	5:56:45 PM	SiCl4 post valve closed
7/15/2012	5:56:45 PM	Main Vac valve closed
7/15/2012	5:56:45 PM	Bypass valve closed
7/15/2012	5:56:45 PM	Bubbler valve closed
7/15/2012	5:56:45 PM	Helium MFC set to  0.000000
7/15/2012	5:56:45 PM	H2 MFC set to  0.000000
7/15/2012	5:56:45 PM	BCl3 MFC set to  0.000000
7/15/2012	5:56:45 PM	PH3 MFC set to  0.000000
7/15/2012	5:56:45 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:56:45 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:56:45 PM	Tube furnace set to 0
7/15/2012	5:56:48 PM	Helium valve closed
7/15/2012	5:56:48 PM	BCl3 valve closed
7/15/2012	5:56:48 PM	PH3 valve closed
7/15/2012	5:56:48 PM	SiCl4 pre valve closed
7/15/2012	5:56:48 PM	SiCl4 post valve closed
7/15/2012	5:56:48 PM	Main Vac valve closed
7/15/2012	5:56:48 PM	Bypass valve closed
7/15/2012	5:56:48 PM	Bubbler valve closed
7/15/2012	5:56:48 PM	H2 valve opened
7/15/2012	5:56:48 PM	Helium MFC set to  0.000000
7/15/2012	5:56:48 PM	H2 MFC set to  500.000000
7/15/2012	5:56:48 PM	BCl3 MFC set to  0.000000
7/15/2012	5:56:48 PM	PH3 MFC set to  0.000000
7/15/2012	5:56:48 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:56:48 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:56:48 PM	Tube furnace set to 0
7/15/2012	5:58:01 PM	Helium valve closed
7/15/2012	5:58:01 PM	BCl3 valve closed
7/15/2012	5:58:01 PM	PH3 valve closed
7/15/2012	5:58:01 PM	SiCl4 pre valve closed
7/15/2012	5:58:01 PM	SiCl4 post valve closed
7/15/2012	5:58:01 PM	Main Vac valve closed
7/15/2012	5:58:01 PM	Bypass valve closed
7/15/2012	5:58:01 PM	H2 valve opened
7/15/2012	5:58:01 PM	Bubbler valve opened
7/15/2012	5:58:01 PM	Helium MFC set to  0.000000
7/15/2012	5:58:01 PM	H2 MFC set to  500.000000
7/15/2012	5:58:01 PM	BCl3 MFC set to  0.000000
7/15/2012	5:58:01 PM	PH3 MFC set to  0.000000
7/15/2012	5:58:01 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:58:01 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:58:01 PM	Tube furnace set to 0
7/15/2012	5:58:02 PM	Helium valve closed
7/15/2012	5:58:02 PM	BCl3 valve closed
7/15/2012	5:58:02 PM	PH3 valve closed
7/15/2012	5:58:02 PM	SiCl4 pre valve closed
7/15/2012	5:58:02 PM	SiCl4 post valve closed
7/15/2012	5:58:02 PM	Main Vac valve closed
7/15/2012	5:58:02 PM	Bypass valve closed
7/15/2012	5:58:02 PM	H2 valve opened
7/15/2012	5:58:02 PM	Bubbler valve opened
7/15/2012	5:58:02 PM	Helium MFC set to  0.000000
7/15/2012	5:58:02 PM	H2 MFC set to  500.000000
7/15/2012	5:58:02 PM	BCl3 MFC set to  0.000000
7/15/2012	5:58:02 PM	PH3 MFC set to  0.000000
7/15/2012	5:58:02 PM	SiCl4 MFC set to  0.000000
7/15/2012	5:58:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	5:58:02 PM	Tube furnace set to 950
7/15/2012	6:13:02 PM	Helium valve closed
7/15/2012	6:13:02 PM	PH3 valve closed
7/15/2012	6:13:02 PM	SiCl4 pre valve closed
7/15/2012	6:13:02 PM	SiCl4 post valve closed
7/15/2012	6:13:02 PM	Main Vac valve closed
7/15/2012	6:13:02 PM	Bypass valve closed
7/15/2012	6:13:02 PM	H2 valve opened
7/15/2012	6:13:02 PM	BCl3 valve opened
7/15/2012	6:13:03 PM	Bubbler valve opened
7/15/2012	6:13:03 PM	Helium MFC set to  0.000000
7/15/2012	6:13:03 PM	H2 MFC set to  400.000000
7/15/2012	6:13:03 PM	BCl3 MFC set to  20.000000
7/15/2012	6:13:03 PM	PH3 MFC set to  0.000000
7/15/2012	6:13:03 PM	SiCl4 MFC set to  0.000000
7/15/2012	6:13:03 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	6:13:03 PM	Tube furnace set to 950
7/15/2012	6:43:03 PM	Helium valve closed
7/15/2012	6:43:03 PM	BCl3 valve closed
7/15/2012	6:43:03 PM	PH3 valve closed
7/15/2012	6:43:03 PM	SiCl4 pre valve closed
7/15/2012	6:43:03 PM	SiCl4 post valve closed
7/15/2012	6:43:03 PM	Main Vac valve closed
7/15/2012	6:43:03 PM	Bypass valve closed
7/15/2012	6:43:03 PM	H2 valve opened
7/15/2012	6:43:03 PM	Bubbler valve opened
7/15/2012	6:43:03 PM	Helium MFC set to  0.000000
7/15/2012	6:43:03 PM	H2 MFC set to  500.000000
7/15/2012	6:43:03 PM	BCl3 MFC set to  0.000000
7/15/2012	6:43:03 PM	PH3 MFC set to  0.000000
7/15/2012	6:43:03 PM	SiCl4 MFC set to  0.000000
7/15/2012	6:43:03 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	6:43:03 PM	Tube furnace set to 750
7/15/2012	6:48:03 PM	H2 valve closed
7/15/2012	6:48:03 PM	BCl3 valve closed
7/15/2012	6:48:03 PM	PH3 valve closed
7/15/2012	6:48:03 PM	SiCl4 pre valve closed
7/15/2012	6:48:03 PM	SiCl4 post valve closed
7/15/2012	6:48:03 PM	Main Vac valve closed
7/15/2012	6:48:03 PM	Bypass valve closed
7/15/2012	6:48:03 PM	Helium valve opened
7/15/2012	6:48:03 PM	Bubbler valve opened
7/15/2012	6:48:03 PM	Helium MFC set to  500.000000
7/15/2012	6:48:03 PM	H2 MFC set to  0.000000
7/15/2012	6:48:03 PM	BCl3 MFC set to  0.000000
7/15/2012	6:48:03 PM	PH3 MFC set to  0.000000
7/15/2012	6:48:03 PM	SiCl4 MFC set to  0.000000
7/15/2012	6:48:03 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	6:48:03 PM	Tube furnace set to 0
7/15/2012	7:08:03 PM	Helium valve closed
7/15/2012	7:08:03 PM	H2 valve closed
7/15/2012	7:08:03 PM	BCl3 valve closed
7/15/2012	7:08:03 PM	PH3 valve closed
7/15/2012	7:08:03 PM	SiCl4 pre valve closed
7/15/2012	7:08:03 PM	SiCl4 post valve closed
7/15/2012	7:08:03 PM	Main Vac valve closed
7/15/2012	7:08:03 PM	Bypass valve closed
7/15/2012	7:08:03 PM	Bubbler valve closed
7/15/2012	7:08:03 PM	Helium MFC set to  0.000000
7/15/2012	7:08:03 PM	H2 MFC set to  0.000000
7/15/2012	7:08:03 PM	BCl3 MFC set to  0.000000
7/15/2012	7:08:03 PM	PH3 MFC set to  0.000000
7/15/2012	7:08:03 PM	SiCl4 MFC set to  0.000000
7/15/2012	7:08:03 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	7:08:03 PM	Tube furnace set to 0
7/15/2012	7:08:04 PM	Run finished at 7:08 PM
7/15/2012	7:33:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	7:33:40 PM	Recipe started at 7:33 PM
7/15/2012	7:33:40 PM	Helium valve closed
7/15/2012	7:33:40 PM	H2 valve closed
7/15/2012	7:33:40 PM	BCl3 valve closed
7/15/2012	7:33:40 PM	PH3 valve closed
7/15/2012	7:33:40 PM	SiCl4 pre valve closed
7/15/2012	7:33:40 PM	SiCl4 post valve closed
7/15/2012	7:33:40 PM	Main Vac valve closed
7/15/2012	7:33:40 PM	Bypass valve closed
7/15/2012	7:33:40 PM	Bubbler valve closed
7/15/2012	7:33:40 PM	Helium MFC set to  0.000000
7/15/2012	7:33:40 PM	H2 MFC set to  0.000000
7/15/2012	7:33:40 PM	BCl3 MFC set to  0.000000
7/15/2012	7:33:40 PM	PH3 MFC set to  0.000000
7/15/2012	7:33:40 PM	SiCl4 MFC set to  0.000000
7/15/2012	7:33:40 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	7:33:41 PM	Tube furnace set to 0
7/15/2012	7:33:44 PM	H2 valve closed
7/15/2012	7:33:44 PM	BCl3 valve closed
7/15/2012	7:33:44 PM	PH3 valve closed
7/15/2012	7:33:44 PM	SiCl4 pre valve closed
7/15/2012	7:33:44 PM	SiCl4 post valve closed
7/15/2012	7:33:44 PM	Main Vac valve closed
7/15/2012	7:33:44 PM	Bypass valve closed
7/15/2012	7:33:44 PM	Bubbler valve closed
7/15/2012	7:33:44 PM	Helium valve opened
7/15/2012	7:33:44 PM	Helium MFC set to  500.000000
7/15/2012	7:33:44 PM	H2 MFC set to  0.000000
7/15/2012	7:33:44 PM	BCl3 MFC set to  0.000000
7/15/2012	7:33:44 PM	PH3 MFC set to  0.000000
7/15/2012	7:33:44 PM	SiCl4 MFC set to  0.000000
7/15/2012	7:33:44 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	7:33:44 PM	Tube furnace set to 0
7/15/2012	7:33:51 PM	Helium valve closed
7/15/2012	7:33:51 PM	H2 valve closed
7/15/2012	7:33:51 PM	BCl3 valve closed
7/15/2012	7:33:51 PM	PH3 valve closed
7/15/2012	7:33:51 PM	SiCl4 pre valve closed
7/15/2012	7:33:51 PM	SiCl4 post valve closed
7/15/2012	7:33:51 PM	Main Vac valve closed
7/15/2012	7:33:51 PM	Bypass valve closed
7/15/2012	7:33:51 PM	Bubbler valve closed
7/15/2012	7:33:51 PM	Helium MFC set to  0.000000
7/15/2012	7:33:51 PM	H2 MFC set to  0.000000
7/15/2012	7:33:51 PM	BCl3 MFC set to  0.000000
7/15/2012	7:33:51 PM	PH3 MFC set to  0.000000
7/15/2012	7:33:51 PM	SiCl4 MFC set to  0.000000
7/15/2012	7:33:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	7:33:51 PM	Tube furnace set to 0
7/15/2012	7:33:52 PM	Run finished at 7:33 PM
7/15/2012	7:33:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	7:37:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	7:37:30 PM	Recipe started at 7:37 PM
7/15/2012	7:37:30 PM	Helium valve closed
7/15/2012	7:37:30 PM	H2 valve closed
7/15/2012	7:37:30 PM	BCl3 valve closed
7/15/2012	7:37:30 PM	PH3 valve closed
7/15/2012	7:37:30 PM	SiCl4 pre valve closed
7/15/2012	7:37:30 PM	SiCl4 post valve closed
7/15/2012	7:37:30 PM	Main Vac valve closed
7/15/2012	7:37:30 PM	Bubbler valve closed
7/15/2012	7:37:30 PM	Bypass valve opened
7/15/2012	7:37:30 PM	Helium MFC set to  0.000000
7/15/2012	7:37:30 PM	H2 MFC set to  0.000000
7/15/2012	7:37:30 PM	BCl3 MFC set to  0.000000
7/15/2012	7:37:30 PM	PH3 MFC set to  0.000000
7/15/2012	7:37:30 PM	SiCl4 MFC set to  0.000000
7/15/2012	7:37:30 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	7:37:30 PM	Tube furnace set to 0
7/15/2012	7:38:39 PM	Helium valve closed
7/15/2012	7:38:39 PM	H2 valve closed
7/15/2012	7:38:39 PM	BCl3 valve closed
7/15/2012	7:38:39 PM	PH3 valve closed
7/15/2012	7:38:39 PM	SiCl4 pre valve closed
7/15/2012	7:38:39 PM	SiCl4 post valve closed
7/15/2012	7:38:39 PM	Main Vac valve closed
7/15/2012	7:38:39 PM	Bubbler valve closed
7/15/2012	7:38:39 PM	Bypass valve opened
7/15/2012	7:38:39 PM	Helium MFC set to  0.000000
7/15/2012	7:38:39 PM	H2 MFC set to  0.000000
7/15/2012	7:38:39 PM	BCl3 MFC set to  0.000000
7/15/2012	7:38:39 PM	PH3 MFC set to  0.000000
7/15/2012	7:38:39 PM	SiCl4 MFC set to  0.000000
7/15/2012	7:38:39 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	7:38:39 PM	Tube furnace set to 0
7/15/2012	7:39:39 PM	Helium valve closed
7/15/2012	7:39:39 PM	H2 valve closed
7/15/2012	7:39:39 PM	BCl3 valve closed
7/15/2012	7:39:39 PM	PH3 valve closed
7/15/2012	7:39:39 PM	SiCl4 pre valve closed
7/15/2012	7:39:39 PM	SiCl4 post valve closed
7/15/2012	7:39:39 PM	Bypass valve closed
7/15/2012	7:39:39 PM	Bubbler valve closed
7/15/2012	7:39:39 PM	Main Vac valve opened
7/15/2012	7:39:39 PM	Helium MFC set to  0.000000
7/15/2012	7:39:39 PM	H2 MFC set to  0.000000
7/15/2012	7:39:39 PM	BCl3 MFC set to  0.000000
7/15/2012	7:39:39 PM	PH3 MFC set to  0.000000
7/15/2012	7:39:39 PM	SiCl4 MFC set to  0.000000
7/15/2012	7:39:39 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	7:39:39 PM	Tube furnace set to 0
7/15/2012	7:39:40 PM	Run finished at 7:39 PM
7/15/2012	7:39:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	8:28:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	8:28:03 PM	Recipe started at 8:28 PM
7/15/2012	8:28:03 PM	Helium valve closed
7/15/2012	8:28:03 PM	H2 valve closed
7/15/2012	8:28:03 PM	BCl3 valve closed
7/15/2012	8:28:03 PM	PH3 valve closed
7/15/2012	8:28:03 PM	SiCl4 pre valve closed
7/15/2012	8:28:03 PM	SiCl4 post valve closed
7/15/2012	8:28:03 PM	Main Vac valve closed
7/15/2012	8:28:03 PM	Bypass valve closed
7/15/2012	8:28:03 PM	Bubbler valve closed
7/15/2012	8:28:03 PM	Helium MFC set to  0.000000
7/15/2012	8:28:03 PM	H2 MFC set to  0.000000
7/15/2012	8:28:03 PM	BCl3 MFC set to  0.000000
7/15/2012	8:28:03 PM	PH3 MFC set to  0.000000
7/15/2012	8:28:03 PM	SiCl4 MFC set to  0.000000
7/15/2012	8:28:03 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	8:28:03 PM	Tube furnace set to 0
7/15/2012	8:28:07 PM	H2 valve closed
7/15/2012	8:28:07 PM	BCl3 valve closed
7/15/2012	8:28:07 PM	PH3 valve closed
7/15/2012	8:28:07 PM	SiCl4 pre valve closed
7/15/2012	8:28:07 PM	SiCl4 post valve closed
7/15/2012	8:28:07 PM	Main Vac valve closed
7/15/2012	8:28:07 PM	Bypass valve closed
7/15/2012	8:28:07 PM	Bubbler valve closed
7/15/2012	8:28:07 PM	Helium valve opened
7/15/2012	8:28:07 PM	Helium MFC set to  500.000000
7/15/2012	8:28:07 PM	H2 MFC set to  0.000000
7/15/2012	8:28:07 PM	BCl3 MFC set to  0.000000
7/15/2012	8:28:07 PM	PH3 MFC set to  0.000000
7/15/2012	8:28:07 PM	SiCl4 MFC set to  0.000000
7/15/2012	8:28:07 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	8:28:07 PM	Tube furnace set to 0
7/15/2012	8:29:20 PM	Helium valve closed
7/15/2012	8:29:20 PM	H2 valve closed
7/15/2012	8:29:20 PM	BCl3 valve closed
7/15/2012	8:29:20 PM	PH3 valve closed
7/15/2012	8:29:20 PM	SiCl4 pre valve closed
7/15/2012	8:29:20 PM	SiCl4 post valve closed
7/15/2012	8:29:20 PM	Main Vac valve closed
7/15/2012	8:29:20 PM	Bypass valve closed
7/15/2012	8:29:20 PM	Bubbler valve closed
7/15/2012	8:29:20 PM	Helium MFC set to  0.000000
7/15/2012	8:29:20 PM	H2 MFC set to  0.000000
7/15/2012	8:29:20 PM	BCl3 MFC set to  0.000000
7/15/2012	8:29:20 PM	PH3 MFC set to  0.000000
7/15/2012	8:29:20 PM	SiCl4 MFC set to  0.000000
7/15/2012	8:29:20 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	8:29:20 PM	Tube furnace set to 0
7/15/2012	8:29:21 PM	Run finished at 8:29 PM
7/15/2012	8:29:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2012	8:36:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	8:36:30 PM	Recipe started at 8:36 PM
7/15/2012	8:36:30 PM	Helium valve closed
7/15/2012	8:36:30 PM	H2 valve closed
7/15/2012	8:36:30 PM	BCl3 valve closed
7/15/2012	8:36:30 PM	PH3 valve closed
7/15/2012	8:36:30 PM	SiCl4 pre valve closed
7/15/2012	8:36:30 PM	SiCl4 post valve closed
7/15/2012	8:36:30 PM	Main Vac valve closed
7/15/2012	8:36:30 PM	Bubbler valve closed
7/15/2012	8:36:30 PM	Bypass valve opened
7/15/2012	8:36:30 PM	Helium MFC set to  0.000000
7/15/2012	8:36:30 PM	H2 MFC set to  0.000000
7/15/2012	8:36:30 PM	BCl3 MFC set to  0.000000
7/15/2012	8:36:30 PM	PH3 MFC set to  0.000000
7/15/2012	8:36:30 PM	SiCl4 MFC set to  0.000000
7/15/2012	8:36:30 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	8:36:30 PM	Tube furnace set to 0
7/15/2012	8:37:38 PM	Helium valve closed
7/15/2012	8:37:38 PM	H2 valve closed
7/15/2012	8:37:38 PM	BCl3 valve closed
7/15/2012	8:37:38 PM	PH3 valve closed
7/15/2012	8:37:38 PM	SiCl4 pre valve closed
7/15/2012	8:37:38 PM	SiCl4 post valve closed
7/15/2012	8:37:38 PM	Main Vac valve closed
7/15/2012	8:37:38 PM	Bubbler valve closed
7/15/2012	8:37:38 PM	Bypass valve opened
7/15/2012	8:37:38 PM	Helium MFC set to  0.000000
7/15/2012	8:37:38 PM	H2 MFC set to  0.000000
7/15/2012	8:37:38 PM	BCl3 MFC set to  0.000000
7/15/2012	8:37:38 PM	PH3 MFC set to  0.000000
7/15/2012	8:37:38 PM	SiCl4 MFC set to  0.000000
7/15/2012	8:37:38 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	8:37:39 PM	Tube furnace set to 0
7/15/2012	8:38:39 PM	Helium valve closed
7/15/2012	8:38:39 PM	H2 valve closed
7/15/2012	8:38:39 PM	BCl3 valve closed
7/15/2012	8:38:39 PM	PH3 valve closed
7/15/2012	8:38:39 PM	SiCl4 pre valve closed
7/15/2012	8:38:39 PM	SiCl4 post valve closed
7/15/2012	8:38:39 PM	Bypass valve closed
7/15/2012	8:38:39 PM	Bubbler valve closed
7/15/2012	8:38:39 PM	Main Vac valve opened
7/15/2012	8:38:39 PM	Helium MFC set to  0.000000
7/15/2012	8:38:39 PM	H2 MFC set to  0.000000
7/15/2012	8:38:39 PM	BCl3 MFC set to  0.000000
7/15/2012	8:38:39 PM	PH3 MFC set to  0.000000
7/15/2012	8:38:39 PM	SiCl4 MFC set to  0.000000
7/15/2012	8:38:39 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	8:38:39 PM	Tube furnace set to 0
7/15/2012	8:38:40 PM	Run finished at 8:38 PM
7/15/2012	8:38:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2012	8:42:27 PM	Recipe started at 8:42 PM
7/15/2012	8:42:27 PM	Helium valve closed
7/15/2012	8:42:27 PM	H2 valve closed
7/15/2012	8:42:27 PM	BCl3 valve closed
7/15/2012	8:42:27 PM	PH3 valve closed
7/15/2012	8:42:27 PM	SiCl4 pre valve closed
7/15/2012	8:42:27 PM	SiCl4 post valve closed
7/15/2012	8:42:27 PM	Bypass valve closed
7/15/2012	8:42:27 PM	Bubbler valve closed
7/15/2012	8:42:27 PM	Main Vac valve opened
7/15/2012	8:42:27 PM	Helium MFC set to  0.000000
7/15/2012	8:42:27 PM	H2 MFC set to  0.000000
7/15/2012	8:42:27 PM	BCl3 MFC set to  0.000000
7/15/2012	8:42:27 PM	PH3 MFC set to  0.000000
7/15/2012	8:42:27 PM	SiCl4 MFC set to  0.000000
7/15/2012	8:42:27 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	8:42:27 PM	Tube furnace set to 0
7/15/2012	11:42:28 PM	Helium valve closed
7/15/2012	11:42:28 PM	H2 valve closed
7/15/2012	11:42:28 PM	BCl3 valve closed
7/15/2012	11:42:28 PM	PH3 valve closed
7/15/2012	11:42:28 PM	SiCl4 pre valve closed
7/15/2012	11:42:28 PM	SiCl4 post valve closed
7/15/2012	11:42:28 PM	Main Vac valve closed
7/15/2012	11:42:28 PM	Bypass valve closed
7/15/2012	11:42:28 PM	Bubbler valve closed
7/15/2012	11:42:28 PM	Helium MFC set to  0.000000
7/15/2012	11:42:28 PM	H2 MFC set to  0.000000
7/15/2012	11:42:28 PM	BCl3 MFC set to  0.000000
7/15/2012	11:42:28 PM	PH3 MFC set to  0.000000
7/15/2012	11:42:28 PM	SiCl4 MFC set to  0.000000
7/15/2012	11:42:28 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	11:42:28 PM	Tube furnace set to 0
7/15/2012	11:42:31 PM	Helium valve closed
7/15/2012	11:42:31 PM	BCl3 valve closed
7/15/2012	11:42:31 PM	PH3 valve closed
7/15/2012	11:42:31 PM	SiCl4 pre valve closed
7/15/2012	11:42:31 PM	SiCl4 post valve closed
7/15/2012	11:42:31 PM	Main Vac valve closed
7/15/2012	11:42:31 PM	Bypass valve closed
7/15/2012	11:42:31 PM	Bubbler valve closed
7/15/2012	11:42:31 PM	H2 valve opened
7/15/2012	11:42:31 PM	Helium MFC set to  0.000000
7/15/2012	11:42:31 PM	H2 MFC set to  500.000000
7/15/2012	11:42:31 PM	BCl3 MFC set to  0.000000
7/15/2012	11:42:31 PM	PH3 MFC set to  0.000000
7/15/2012	11:42:31 PM	SiCl4 MFC set to  0.000000
7/15/2012	11:42:31 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	11:42:31 PM	Tube furnace set to 0
7/15/2012	11:43:47 PM	Helium valve closed
7/15/2012	11:43:47 PM	BCl3 valve closed
7/15/2012	11:43:47 PM	PH3 valve closed
7/15/2012	11:43:47 PM	SiCl4 pre valve closed
7/15/2012	11:43:47 PM	SiCl4 post valve closed
7/15/2012	11:43:47 PM	Main Vac valve closed
7/15/2012	11:43:47 PM	Bypass valve closed
7/15/2012	11:43:47 PM	H2 valve opened
7/15/2012	11:43:47 PM	Bubbler valve opened
7/15/2012	11:43:47 PM	Helium MFC set to  0.000000
7/15/2012	11:43:47 PM	H2 MFC set to  500.000000
7/15/2012	11:43:47 PM	BCl3 MFC set to  0.000000
7/15/2012	11:43:47 PM	PH3 MFC set to  0.000000
7/15/2012	11:43:47 PM	SiCl4 MFC set to  0.000000
7/15/2012	11:43:47 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	11:43:47 PM	Tube furnace set to 0
7/15/2012	11:43:48 PM	Helium valve closed
7/15/2012	11:43:48 PM	BCl3 valve closed
7/15/2012	11:43:48 PM	PH3 valve closed
7/15/2012	11:43:48 PM	SiCl4 pre valve closed
7/15/2012	11:43:48 PM	SiCl4 post valve closed
7/15/2012	11:43:48 PM	Main Vac valve closed
7/15/2012	11:43:48 PM	Bypass valve closed
7/15/2012	11:43:48 PM	H2 valve opened
7/15/2012	11:43:48 PM	Bubbler valve opened
7/15/2012	11:43:48 PM	Helium MFC set to  0.000000
7/15/2012	11:43:48 PM	H2 MFC set to  500.000000
7/15/2012	11:43:48 PM	BCl3 MFC set to  0.000000
7/15/2012	11:43:48 PM	PH3 MFC set to  0.000000
7/15/2012	11:43:48 PM	SiCl4 MFC set to  0.000000
7/15/2012	11:43:48 PM	Bypass solenoid MFC set to  0.000000
7/15/2012	11:43:48 PM	Tube furnace set to 1000
